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Method of fabricating a multi-chip module

  • US 6,214,641 B1
  • Filed: 11/23/1999
  • Issued: 04/10/2001
  • Est. Priority Date: 06/25/1996
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a multi-chip module, comprising:

  • providing a carrier substrate having a top side and a bottom side, a plurality of openings therethrough, at least one recess partially extending into said carrier substrate from said bottom side and aligned with one of said plurality of openings, and a plurality of conductive traces on said top side proximate each of said plurality of openings;

    attaching a plurality of semiconductor dice each having an active surface with a plurality of bond pads disposed thereover adjacent said bottom side of said carrier substrate such that a portion of an active surface of each of said plurality of semiconductor dice is aligned with one of said plurality of openings and said plurality of bond pads is exposed therethrough, at least one of said plurality of semiconductor dice being secured at least partially within said at least one recess; and

    electrically connecting at least one of said plurality of conductive traces to at least one of said plurality of bond pads of each of said plurality of semiconductor dice through an intermediate conductive element to form a circuit including said conductive traces.

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