Bulk acoustic wave resonator with improved lateral mode suppression

• US 6,215,375 B1
• Filed: 03/30/1999
• Issued: 04/10/2001
• Est. Priority Date: 03/30/1999
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Ruby, Richard C., Bradley, Paul, Larson, John D. III
• Primary Examiner(s): Pascal, Robert
• Assistant Examiner(s): Summons, Barbara
• Application Number:
  US09/282,082
• Time in Patent Office: 742 Days
• Field of Search: 333/186-192, 310/320-324, 310/349, 310/351, 310/353, 310/365, 310/366, 310/334, 310/335, 310/311
• US Class Current: 333/187
• CPC Class Codes: H03H 9/02118 of lateral leakage between adjacent resonators
• CPC Class Codes: H03H 9/132 characterized by a particular shape
• CPC Class Codes: H03H 9/174 Membranes
• CPC Class Codes: H03H 9/585 Stacked Crystal Filters [SCF]

Abstract

A bulk acoustic wave device that provides a high spectral purity, high Q, resonator in the radio frequency and microwave frequency ranges. Such resonators may be coupled together to form filters or other frequency selective devices. The bulk acoustical wave filter is constructed from a piezoelectric (PZ) material having a first surface and a second surface and first and second electrodes. The first electrode includes an electrically conducting layer on the first surface, and the second electrode includes an electrically conducting layer on the second surface. The first electrode overlies at least a portion of the second electrode, the portion of the first electrode that overlies the second electrode has a periphery which is a non-rectangular, irregular polygon. In the preferred embodiment of the present invention, the periphery is a three-sided, four-sided, or n-sided irregular polygon in which no two sides are parallel to one another.

Claims

1. A filter for absorbing energy in a frequency band, said filter comprising:

a PZ sheet having a first surface and a second surface;

a first electrode comprising an electrically conducting layer on said first surface; and

a second electrode comprising an electrically conducting layer on said second surface, wherein said first electrode overlies at least a portion of said second electrode, said portion of said second electrode having a periphery chosen such that the amplitude of any transverse mode absorption peak in said frequency band is less than one half the amplitude of any transverse mode absorption peak obtained with a rectangular periphery.

2. The filter of claim 1 wherein said periphery is chosen such that the amplitude of any transverse mode absorption peak in said frequency band is less than one tenth the amplitude of any transverse mode absorption peak obtained with a rectangular periphery.

3. The filter of claim 1 further comprising a structure for supporting said portion of said PZ sheet over a cavity such that said first electrode has an air interface on the side thereof that is not in contact with said PZ.

4. The filter of claim 1 wherein said periphery further comprises a curved segment.

5. The filter of claim 1 wherein said periphery is an irregular polygon in which no two sides are parallel to one another.

6. A filter comprising:

a PZ sheet having a first surface and a second surface;

a first electrode comprising an electrically conducting layer on said first surface; and

a second electrode comprising an electrically conducting layer on said second surface, wherein said first electrode overlies at least a portion of said second electrode, said portion of said second electrode having a periphery comprising at least a portion of a non-rectangular, irregular polygon, wherein said first electrode comprises a conducting sheet having a non-conducting region contained therein, and wherein said periphery is chosen such that the amplitude of any transverse mode absorption peak in said frequency band is less than one half the amplitude of any transverse mode absorption peak obtained with a rectangular periphery.

7. A filter comprising:

a PZ sheet having a first surface and a second surface;

a first electrode comprising an electrically conducting layer on said first surface; and

a second electrode comprising an electrically conducting layer on said second surface, wherein said first electrode overlies at least a portion of said second electrode, said portion of said second electrode having a periphery comprising at least a portion of a non-rectangular, irregular polygon, wherein said polygon being a four-sided polygon in which no two sides are parallel to one another.