System for enabling the real-time detection of focus-related defects

• US 6,215,896 B1
• Filed: 11/20/1997
• Issued: 04/10/2001
• Est. Priority Date: 09/29/1995
• Status: Expired due to Term

• Current Assignee: Advanced Micro Devices SDN Berhad (Advanced Micro Devices, Inc.)
• Original Assignee: Advanced Micro Devices SDN Berhad (Advanced Micro Devices, Inc.)
• Inventors: Stone, Robert, Greig, R. Michael, Shackelford, Mark K.
• Primary Examiner(s): Boudreau, Leo H.
• Assistant Examiner(s): Werner, Brian P.
• Application Number:
  US08/974,800
• Time in Patent Office: 1,237 Days
• Field of Search: 382/145, 382/149, 382/151, 382/228, 382/144, 382/255, 382/154, 364/490, 364/491, 348/87, 348/126, 438/14-18, 356/237.4, 356/237.5, 356/375, 702/166, 702/179, 250/559.29, 250/559.38, 250/559.39, 250/559.41
• US Class Current: 382/149
• CPC Class Codes: G03F 7/70641 Focus
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like

Abstract

A real-time hotspot detection system is disclosed. In a preferred embodiment, the real-time hotspot detection system of the present invention comprises a photolithography stepper that has been modified to output z-height focus data for each cell to a fault detection module of the present invention. After the entire wafer has been exposed by the stepper, the fault detection module computes the mean and standard deviation and/or other statistical data for the wafer data and compares the computed standard deviation with a predetermined limits for “normal” standard deviation, representative of a completely flat wafer having no hotspots thereon. If the computed standard deviation is outside the limits for the normal standard deviation, the fault detection module provides control signals to the stepper for halting the operation thereof and for generating an indication to the stepper operator, via a pole light associated with the stepper, that a failure has occurred. In addition, a wafer map showing the z-height data of the wafer that caused the failure may be displayed on a display associated with the module to enable a visual inspection to be performed and the cause of the hotspot to be more easily located.

Claims

1. A system for enabling the real-time detection of a focus-related defect induced in a semiconductor wafer during a photolithographic process, said wafer including a plurality of cells, the system comprising:

a photolithography stepper for transferring an image to each cell of said wafer, said photolithography stepper outputting focus data, including z-height data, for each cell;

a fault detection module electrically connected to said photolithography stepper for receiving the focus data output for each cell and, in response to said focus data for all the cells of said wafer, for calculating a mean and standard deviation directly from the focus data for all of the cells on the wafer and comparing the calculated standard deviation to the mean ±

3σ

, representative of a completely flat wafer having no hotspots or other focus abnormalities thereon; and

wherein in response to a determination that the calculated standard deviation does not fall within said mean ±

3σ

, said fault detection module halts operations of said photolithography stepper.

2. The system of claim 1 further comprising a video monitor electrically connected to said fault detection module for displaying a wafer map of said wafer responsive to a determination that there is a focus-related defect on said wafer.

3. The system of claim 1 further comprising a communications computer electrically connected to said photolithography stepper for receiving said focus data therefrom, said communications computer being further electrically connected to a network drive via a network, said communications computer periodically uploading files containing said focus data to said network drive for storage thereon and access therefrom via other computers connected to said network.

4. The system of claim 1 further comprising an alarm electrically connected to said fault detection module for providing an indication to an operator of said photolithography stepper when said photolithography stepper operation has been halted.

5. The system of claim 4 wherein said alarm comprises an audible indicator.

6. The system of claim 4 wherein said alarm comprises a visible indicator.

7. The system of claim 1 wherein said fault detection module comprises a neural network.

8. The apparatus of claim 1 wherein said means for receiving and determining comprises a neural network for analyzing said focus data for said wafer.

9. Apparatus for enabling the real-time detection of a focus-related defect induced in a semiconductor wafer during a photolithographic process, the apparatus comprising:

means for transferring an image to each of a plurality of cells of said wafer, said transferring means outputting focus data, including z-height data, for each of said cells of said wafer;

means electrically connected to said transferring means for receiving said focus data;

means for determining the mean and standard deviation directly from said focus data from all said cells of said wafer; and

means for determining whether said standard deviation falls within the mean ±

3σ

, representative of a completely flat wafer having no hotspots or other focus abnormalities thereon;

wherein responsive to a determination that said standard deviation does not fall within said mean ±

3σ

, operation of said transferring means is halted.

10. The apparatus of claim 9 wherein said transferring means comprises a photolithography stepper.

11. The apparatus of claim 9 further comprising display means electrically connected to said means for receiving and determining for displaying a wafer map of said wafer responsive to a determination that said focus data for said wafer does not fall within said predetermined normal limits.

12. The apparatus of claim 9 further comprising communication means electrically connected to said transferring means for receiving said focus data therefrom, said communication means being further electrically connected to a storage means via a network, said communications means periodically uploading files containing said focus data to said storage means for storage thereon and access therefrom via computers connected to said network.

13. The apparatus of claim 12 wherein said communication means comprises a communications computer connected to said network.

14. The apparatus of claim 9 further comprising an indicator means electrically connected to said means for receiving and determining for providing an indication to an operator of said transferring means when said transferring means operation has been halted.

15. The apparatus of claim 14 wherein said indicator means comprises an audible indicator.

16. The apparatus of claim 14 wherein said indicator means comprises a visible indicator.

17. A method of enabling the real-time detection of focus-related defects induced in a wafer during performance of a photolithographic process performed using a photolithography stepper, the method comprising:

transferring an image to each of a plurality of cells of said wafer, said photolithography stepper outputting focus data, including z-height data, for each of said cells of said wafer;

collecting said focus data for each of said cells of said wafer;

in response to said focus data for each of said cells of said wafer, determining a mean and standard deviation directly from said focus data for all of said cells;

determining whether said standard deviation for said wafer falls within the mean ±

3σ

, representative of a completely flat wafer having no hotspots or other focus abnormalities thereon; and

responsive to a determination that said focus data for said wafer does not fall within said mean ±

3σ

, halting operation of said photolithography stepper.

18. The method of claim 17 further comprising:

comparing said calculated standard deviation to said mean±

3σ

.

19. The method of claim 17 further comprising displaying a wafer map of all of said cells of said wafer responsive to a determination that said focus data for said wafer does not fall within said predetermined normal limits.

20. The method of claim 17 further comprising periodically uploading files containing said focus data to a network drive for storage thereon and access therefrom via a network.

21. The method of claim 17 further comprising providing an indication to an operator of said photolithography stepper when said photolithography stepper operation has been halted.

22. The method of claim 21 wherein said indication comprises an audible indication.

23. The method of claim 21 wherein said indication comprises a visible indication.

24. A semiconductor fabrication process, comprising:

(a) stepping a semiconductor wafer to align one cell of a plurality of cells of the wafer with a photolithography system, each of the plurality of cells corresponding to one or more integrated circuit chips;

(b) transferring an image to one cell of the wafer;

(c) determining focus data for the cell;

(d) repeating (a)-(c) for each cell of the plurality of cells on the wafer;

(e) determining a defect value, including a mean and standard deviation, directly from the focus data, including z-height data, for all of the cells on the wafer;

(f) in response to said focus data of step (e), determining whether the defect value falls within the mean ±

3σ

, representative of a completely flat wafer having no hotspots or other focus abnormalities thereon; and

(g) continuing fabrication of the wafer if the defect falls within said mean ±

3σ

.

25. A semiconductor wafer formed according to the process of claim 24.

26. An integrated circuit chip formed according to the process of claim 24.

27. A system for enabling the real-time detection of a focus-related defect induced in a semiconductor wafer during a photolithographic process, said wafer including a plurality of cells, the system comprising:

a photolithography stepper for transferring an image to each cell of said wafer, the photolithography stepper generating focus data, including z-height data, for each cell;

using the focus data for all the cells, a fault detection module electrically connected to said photolithography stepper for receiving the focus data, the fault detection module configured and arranged to use the focus data for the cells of the wafer by calculating a mean and standard deviation directly from the focus data for all of the cells on the wafer and comparing the calculated standard deviation to the mean ±

3σ

, representative of a reference wafer having a set of known characteristics; and

wherein in response to a determination that the calculated standard deviation does not fall within the mean ±

3σ

, the fault detection module interrupts operations of said photolithography stepper.