Cathode for an electrochemical cell
First Claim
1. A cathode for a thin-film electrochemical cell comprising an amorphous metal-oxide layer having a submicron microstructure.
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Abstract
Described is a thin-film battery, especially a thin-film microbattery, and a method for making same having application as a backup or primary integrated power source for electronic devices. The battery includes a novel electrolyte which is electrochemically stable and does not react with the lithium anode and a novel vanadium oxide cathode. Configured as a microbattery, the battery can be fabricated directly onto a semiconductor chip, onto the semiconductor die or onto any portion of the chip carrier. The battery can be fabricated to any specified size or shape to meet the requirements of a particular application. The battery is fabricated of solid state materials and is capable of operation between −15° C. and 150° C.
86 Citations
3 Claims
- 1. A cathode for a thin-film electrochemical cell comprising an amorphous metal-oxide layer having a submicron microstructure.
Specification