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Semiconductor device and method for fabricating the same

  • US 6,218,248 B1
  • Filed: 04/02/1999
  • Issued: 04/17/2001
  • Est. Priority Date: 04/02/1998
  • Status: Expired due to Term
First Claim
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1. A method for fabricating a semiconductor device comprising:

  • forming first and second transistors of a type defined by impurity ion implanting layers within a semiconductor substrate having a buried oxide film and surface silicon layers thereon, the first and second transistors having source/drain regions, a gate and single crystal silicon layers connected to the first and second impurity ion implanting layers;

    implanting an impurity ion into at least one of the source/drain regions of the respective transistors, and into the single crystal silicon layers connected to the first and second impurity ion implanting layers; and

    forming carrier exhausting electrodes, each connected to one of the impurity ion implanting layers at one side of each of the first and second transistors, where the carrier exhausting electrodes exhaust carriers generated by ionization impact in the respective transistors.

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