Module with metal-ion matrix induced dendrites for interconnection
First Claim
1. A semiconductor module comprising:
- a carrier having a carrier mating surface with carrier pads thereon;
a semiconductor device secured to the carrier, the device having a semiconductor mating surface opposing the carrier mating surface, and having device pads opposing corresponding ones of the carrier pads to define mating pad pairs;
a polymer interposed between the mating surfaces;
ionized metallic particles suspended in the polymer, certain of the metallic particles being migrated within the polymer to form concentrated regions of the metallic particles, the concentrated regions of the migrated metallic particles in the form of dendrites at locations in the polymer corresponding to the mating pad pairs; and
metallurgical bonds between the pads of the mating pad pairs, the bonds comprising the migrated metallic particles.
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Accused Products
Abstract
A module or assembly is formed by interposing a polymer between a carrier and a semiconductor device to be secured to the carrier. The polymer has ionized metallic particles suspended in it. Before setting or curing the polymer, the module is exposed to an electric field which induces migration of the metallic particles to the opposing pads of the carrier and semiconductor device. Such migration ultimately forms metal dendrites extending between mating pad pairs. The dendrites establish a metallurgical bond and conductive paths between the carrier and the overlying semiconductor device. When the polymer is subsequently set, the carrier and device are not only adhered to each other, but the dendrite connections are fixed and structurally reinforced to provide the needed electrically conductive paths.
18 Citations
11 Claims
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1. A semiconductor module comprising:
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a carrier having a carrier mating surface with carrier pads thereon;
a semiconductor device secured to the carrier, the device having a semiconductor mating surface opposing the carrier mating surface, and having device pads opposing corresponding ones of the carrier pads to define mating pad pairs;
a polymer interposed between the mating surfaces;
ionized metallic particles suspended in the polymer, certain of the metallic particles being migrated within the polymer to form concentrated regions of the metallic particles, the concentrated regions of the migrated metallic particles in the form of dendrites at locations in the polymer corresponding to the mating pad pairs; and
metallurgical bonds between the pads of the mating pad pairs, the bonds comprising the migrated metallic particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification