Sensor element with small area light detecting section of bridge structure
First Claim
1. An infrared sensor having a bridge structure, the sensor comprising:
- a substrate, a light detecting section spaced from said substrate and having a resonance structure in which infrared rays passing through the light detecting section are reflected and re-input to the light detecting section, and a microlens having characteristics to collect incident infrared rays and to output the collected infrared rays to the light detecting section in a perpendicular direction thereto.
1 Assignment
0 Petitions
Accused Products
Abstract
A sensor element includes a light detecting section (2), a wiring section and a microlens section (7, 8). The light detecting section (2) is formed to be spaced from a substrate (1) to detect an incident light. The wiring section is composed of leg sections (3, 4) and outputting sections (11, 12) formed to be spaced from the substrate in a peripheral portion of the light detecting section. The wiring section connects the detecting result of the light detecting section to patterns on the substrate. The microlens section is formed to be spaced from the light detecting section to collect and output the incident light to the light detecting section. An area of the light detecting section is equal to or smaller than ¼ of an area of the sensor element. The sensor element may further include a reflecting film formed under the light detecting section to reflect the incident light which passes through the light detecting section.
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Citations
31 Claims
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1. An infrared sensor having a bridge structure, the sensor comprising:
- a substrate, a light detecting section spaced from said substrate and having a resonance structure in which infrared rays passing through the light detecting section are reflected and re-input to the light detecting section, and a microlens having characteristics to collect incident infrared rays and to output the collected infrared rays to the light detecting section in a perpendicular direction thereto.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 19)
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10. An infrared sensor having a bridge structure, the sensor comprising:
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a substrate, a light detecting section spaced from said substrate and having a resonance structure in which infrared rays passing through the light detecting section are reflected and re-input to the light detecting section, and a microlens having characteristics to collect incident infrared rays and to output the collected infrared rays to the light detecting section in a perpendicular direction thereto, said microlens including a first curved surface to collect the incident infrared rays substantially in parallel, and a second curved surface to output the collected infrared rays as a substantially parallel light, and said microlens has a laminate structure of a plurality of layers, an upper surface of an uppermost layer of said laminate structure is said first curved surface, and a bottom surface of a lowermost layer of said laminate structure is said second curved surface. - View Dependent Claims (11, 12)
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13. An infrared sensor having a bridge structure, the sensor comprising:
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a substrate, a light detecting section spaced from said substrate and having a resonance structure in which infrared rays passing through the light detecting section are reflected and re-input to the light detecting section, and a microlens having characteristics to collect incident infrared rays and to output the collected infrared rays to the light detecting section in a perpendicular direction thereto, said microlens including a first curved surface to collect the incident infrared rays substantially in parallel, and a second curved surface to output the collected infrared rays as a substantially parallel light, and said microlens including a refracting layer having said first and second curved surfaces, and a lens substrate connected to the refracting layer. - View Dependent Claims (14, 15, 16, 17)
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18. An infrared sensor of a non-cooling type and having a bridge structure, the sensor comprising:
- a substrate, a light detecting section spaced from said substrate and supported on the substrate by leg sections, and a microlens provided above the light detecting section, an area of the light detecting section to which infrared rays collected by the microlens are irradiated being equal to or less than ½
of a whole area which is spaced from the substrate. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
- a substrate, a light detecting section spaced from said substrate and supported on the substrate by leg sections, and a microlens provided above the light detecting section, an area of the light detecting section to which infrared rays collected by the microlens are irradiated being equal to or less than ½
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29. An infrared sensor having a bridge structure, the sensor comprising:
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a substrate, a light detecting section spaced from said substrate and having a resonance structure in which infrared rays passing through the light detecting section are reflected and re-input to the light detecting section, and a microlens having characteristics to collect incident infrared rays and to output the collected infrared rays to the light detecting section in a perpendicular direction thereto, said light detecting section including a resist pattern composed of a material having a resistivity in a range of 0.5-0.05 Ω
cm.- View Dependent Claims (30, 31)
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Specification