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Smart microsensor arrays with silicon-on-insulator readouts for damage control

  • US 6,218,687 B1
  • Filed: 12/21/1998
  • Issued: 04/17/2001
  • Est. Priority Date: 12/21/1998
  • Status: Expired due to Fees
First Claim
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1. A microsensor for identifying a change in a characteristic of an environment having temperatures below approximately five hundred degrees Centigrade which comprises:

  • a substantially flat insulator layer, said insulator layer having a first surface and a second surface;

    a base layer integrally attached to said insulator layer to cover said second surface thereof to stabilize said insulator layer;

    a support layer integrally attached to said insulator layer to cover said first surface thereof, said support layer having an exposed surface;

    a plurality of sensor elements processed into said exposed surface of said support layer to generate a respective plurality of signals in response to the change in the environment characteristic; and

    a plurality of electronic elements, each said electronic element being connected directly with at least one said sensor element to collectively process said signals.

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