Position sensing with variable capacitance transducers

• US 6,218,803 B1
• Filed: 06/04/1999
• Issued: 04/17/2001
• Est. Priority Date: 06/04/1999
• Status: Expired due to Term

• Current Assignee: Affymetrix, Inc. (Thermo Fisher Scientific Incorporated)
• Original Assignee: Genetic MicroSystems, Inc. (Thermo Fisher Scientific Incorporated)
• Inventors: Honkanen, Peter, Weiner, Nathan K., Montagu, Jean I.
• Primary Examiner(s): Ro, Bentsu
• Application Number:
  US09/326,374
• Time in Patent Office: 683 Days
• Field of Search: 318/632, 318/652, 318/662, 361/287, 361/289, 361/292
• US Class Current: 318/662
• CPC Class Codes: G01D 5/2403 by moving plates, not forming part of the capacitor itself, e.g. shields
• CPC Class Codes: G01D 5/2405 by varying dielectric

Abstract

For enabling precise operation of an oscillating device, such as a galvanometric optical scanner, a capacitive position transducer is provided with strategically located internal capacitive fiducial features that interact with the armature of the transducer beyond the central range of excursion of the transducer, typically beyond the normal operating range of the device. Electric pulses obtained at instants of interaction with the fiducials enable determination of position drift caused e.g. by change in environmental conditions. The pulses can be detected by simple circuits to produce recalibration of the amplitude and null position of the instrument on an automatic or elective basis.

Claims

1. A capacitive position detector comprising a fixed structure comprising an energizing plate and opposed thereto, separated by a gap, at least one sensing plate, and an armature movable in the gap dependently with the motion of an element the position of which is to be sensed, the armature constructed to alter the capacitive coupling between the energizing and sensing plates dependently with its change in position, and at least one capacitive fiducial feature located in a known position substantially opposed to the energizing plate, the position being disposed at a predetermined point along the path of travel of the armature, the fiducial feature so arranged to produce a discrete signal at the time when the armature reaches and interacts with it, thereby to signal a precise location of the armature relative to the fixed structure.

2. The position detector of claim 1 in combination with a limited rotation motor having a shaft element the angular position of which is to be sensed.

3. The position detector of claim 2 comprising a galvanometric optical scanner.

4. The position detector of any of the preceding claims in which the fiducial feature comprises a discrete capacitor fiducial plate, arranged to produce a position signal which is independent of signal derived from said sensing plate.

5. The position detector of claim 4 in which the energizing plate is an annular ring encircling a shaft that comprises the element the rotary position of which is to be sensed, there is a set of arc-segment sensing plates encircling the shaft, the fiducial feature comprises a discrete fiducial capacitive plate located radially outward from said arc-segment sensing plates, and the armature has a portion extending radially sufficiently to interact with the fiducial plate.

6. The position detector of claim 5 wherein said set of plates comprises four substantially identical plates arranged in a circle, the first and third of which and the second and fourth of which are electrically connected, the armature having two opposed arms which correspondingly overlap the first and second and the third and fourth sensing plates, respectively, there being at least two fiducial features respectively associated with the first or third and the second or fourth sensing plate;

the armature having tip extensions that extend radially beyond the extent of said plates to interact with the fiducial plates in regions displaced angularly, beyond the maximum normal operational excursion of the shaft respectively with respect to counterclockwise and clockwise rotation.

7. The position detector of claim 6 in combination with circuitry constructed and arranged to respond to pulses originating at said fiducial plates to correct gain or null drift of a driver for the shaft.

8. The position detector of claim 14 in which the sensing plates and the fiducial plate are supported on isotropic material in the manner that the angular location of the fiducial plate and the sensing plates do not change with respect to each other with change in ambient conditions.

9. The position detector of claim 4 in combination with circuitry constructed and arranged to respond to pulses originating at said fiducial plate when correcting gain or null drift of a driver for the element the position of which is sensed.

10. The position detector of any of the preceding claim 1, 2 or 3 in which the fiducial feature is formed by a perturbation in said sensing plate to produce a position signal superposed on the signal derived from the main body of said sensing plate.

11. The position detector of claim 10 in which the perturbation comprises a discrete radial enlargement of the sensor plate.

12. The position detector of claim 10 in which the perturbation is a partial radial slot formed in the sensing plate.

13. The position detector of claim 10 in which the energizing plate is an annular ring encircling a shaft that comprises the element the rotary position of which is to be sensed and there is a set of arc-segment sensing plates encircling the shaft at least one of which has said perturbation.

14. The position detector of claim 13 wherein said set of plates comprises four substantially identical plates arranged in a circle, the first and third of which and the second and fourth of which are electrically connected, the armature having two opposed arms which correspondingly overlap the first and second and the third and fourth sensing plates, there being at least two fiducial features associated with the first or third and the second or fourth sensing plate, respectively.

15. The position detector of claim 14 in combination with circuitry constructed and arranged to respond to pulses originating at said fiducial feature to correct gain or null drift of a driver for the shaft.

16. The position detector of claim 13 in which the sensing plates are supported on isotropic material in the manner that the angular location of the sensing plates and the fiducial feature do not change with respect to each other with change in ambient conditions.

17. The position detector of claim 10 in combination with circuitry constructed and arranged to respond to pulses originating at said fiducial feature to correct gain or null drift of a driver for the element position of which is sensed.

18. A position transducer comprising a fixed and a movable structure constructed to provide to a measurement circuit an electrical signal corresponding to a position of the movable structure with respect to the fixed structure;

said position transducer including at least one internal fiducial calibration feature causing an electrical perturbation signal at a selected position of the movable structure with respect to the fixed structure.

19. The position transducer of claim 18 combined with a limited rotation motor having a moving iron, a moving magnet or moving conductive rotor associated with a shaft, the transducer being of the capacitive type having a rotatable armature, included as part of said movable structure, mounted on the shaft, and the fixed structure including the fiducial calibration feature constructed to have capacitive interaction with the armature.

20. The position transducer of claim 19 in which the transducer comprises said fixed structure including a plurality of arc-segment capacitor sensing plate elements, which encircle the rotating shaft of the motor, and a ring-shaped capacitive excitation plate member which encircles the rotating shaft and is spaced along the axis of the shaft from the arc-segment plate member to form a gap, the armature comprising a member having at least a pair of oppositely disposed arms fixed to the rotating shaft and disposed in the gap between the sensing plate members and the excitation plate member so that the capacitance structure thereby effectively provides a pair of capacitances having capacitance values C_1,3 and C_2,4 which vary in opposite directions as the shaft and attached armature member rotate, circuitry including such capacitances to determine the capacitance difference (C_1,3-C_2,4) to produce an output signal which represents the angular position of the rotating shaft, the capacitor plate members so arranged that the position transducer is essentially insensitive to radial motions of the rotary shaft, the at least one capacitive fiducial feature including internal angular position fiducial references which are built into the structure of the transducer at selected locations.

21. The position transducer of claim 20 wherein the internal fiducial references are formed by perturbations of the capacitive arc-shaped segments.

22. The position transducer of claim 20 wherein the internal fiducial references comprise an additional set of capacitive plates located to sense the presence of mating features on the moving armature.

23. The position transducer of claim 22 in which the fiducial references are fiducial capacitive segments located in proximity to the arc-segment capacitor sensing segments, in location to interact electrostatically with features of the moving armature to identify position.

24. The position transducer of claim 21, 22 or 23 in which two fiducial segments are located to identity, respectively, clockwise (CW) and counter clockwise (CCW) positions with reference to the center position of the transducer.

25. The position transducer of claim 21, 22, or 23 in which the material of the support for the arc-segment capacitor sensing segments and the fiducial feature is selected to deform in an isotropic manner, whereby the angular relation between internal fiducial references is maintained as well as is their relation to a mount anchoring said fiducial references to a frame of reference, whereby the transducer preserves its ability to provide its gain stability over a range of changes of ambient conditions.

26. The position transducer of claim 21, 22 or 23 including circuitry to measure the difference of voltage of the signal just as said electrical perturbation signals associated respectively with the fiducial references first appear, to determine the angular sensitivity of the transducer.

27. The position transducer of claim 26 constructed to implement a calibration or re-calibration protocol to ensure drift-free gain sensitivity of the transducer.

28. The position transducer of claim 27 constructed to add a DC bias signal to a detected signal such that, at two angular positions of the angular position fiducial references, the output of the electronics of the transducer has equal value and opposite polarity.

29. The position transducer of claim 26 constructed to define the center position of the angular detector i.e. null or zero position as the mid-point between two approximately symmetrically located internal fiducial features.

30. The position transducer of claim 21 wherein the internal fiducial references are shaped as partial narrow radial cuts or other perturbations of the geometry of one of the four arcuate capacitive sensing plates.

31. The position transducer of claim 30 constructed to cause the armature member to rotate at nearly constant speed over one of the cuts or other perturbations to produce a proportionally narrow spike superimposed on the position signal or the drive current or the error signal of a servo amplifier, the spike representing the location of the cut or other perturbation with respect to the fixed transducer structure, to serve as a fixed reference of the apparatus.

32. The position transducer of claim 30 having a second symmetrically similar cut or other perturbation of the geometry on a symmetrical arcuate capacitive sensor plate of opposite polarity, to produce a similar spike when the armature member is made to rotate similarly but in the opposite direction.

33. A method of determining a center position of a transducer comprising the acts of:

providing a fixed and a movable structure constructed to provide to a measurement circuit an electrical signal corresponding to a position of said movable structure relative to said fixed structure;

said fixed structure including two internal fiducial calibration features causing, with respect to said movable structure, electrical perturbation signals received by the measurement circuit;

displacing said movable structure;

determining position signals based on said electrical signal corresponding to a position of said movable structure relative to said fixed structure;

detecting said electrical perturbation signals caused by said two internal fiducial calibration features; and

defining the center or null position, the position being defined with reference to positions of said two internal fiducial features.

34. The method of claim 33 wherein said fixed structure comprises an energizing plate and opposed thereto, separated by a gap, at least one sensing plate and said fiducial calibration features, said movable structure comprises an armature movable in the gap dependently with the motion of an element the position of which is to be sensed, the armature being constructed to alter the capacitive coupling between the energizing and sensing plates dependently with its change in position, said displacing act includes producing said perturbation signals at the time when the armature reaches and interacts with said two internal fiducial calibration features.

35. The method of claim 34 wherein said defining includes measuring a difference of position signals at the perturbation signals associated respectively with the fiducial reference to determine angular sensitivity of the transducer.

36. A method of calibrating a position transducer comprising the acts of:

providing a fixed and a movable structure constructed to provide to a measurement circuit an electrical signal corresponding to a position of said movable structure;

said position transducer including at least one internal fiducial calibration feature causing an electrical perturbation signal at a selected position of the movable structure with respect to the fixed structure;

displacing said movable structure;

determining position signals based on said electrical signal corresponding to a position of said movable structure relative to said fixed structure;

detecting said electrical perturbation signal caused by said at least one internal fiducial calibration feature; and

calibrating said position transducer.

37. The method of claim 36 wherein said fixed structure comprises an energizing plate and opposed thereto, separated by a gap, at least one sensing plate and said fiducial calibration feature formed by two angular position fiducial references;

said movable structure comprises an armature rotatable in the gap dependently with a rotation of a measured element, the armature being constructed to alter the capacitive coupling between the energizing and sensing plates dependently with the armature'"'"'s change in position, said displacing act includes producing said perturbation signals at the time when the armature rotates to reach and interact with said two internal fiducial calibration features.

38. The method of claim 37 wherein said calibrating act includes measuring the difference between said position signals when said electrical perturbation signals associated respectively with the fiducial references are detected to calibrate a position gain of the transducer.

39. The method of claim 38 wherein said calibrating act includes a center position of the position transducer.