Multiwavelength imaging and spectroscopic photoemission microscope system

• US 6,222,187 B1
• Filed: 07/02/1998
• Issued: 04/24/2001
• Est. Priority Date: 07/03/1997
• Status: Expired due to Fees

• Current Assignee: Institute of Microelectronics
• Original Assignee: Institute of Microelectronics
• Inventors: Shivanandan, Kandiah
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): GAGLIARDI, ALBERT J
• Application Number:
  US09/109,619
• Time in Patent Office: 1,027 Days
• Field of Search: 250/330, 250/332, 250/338.1, 250/339.01, 250/339.05, 250/339.07, 358/51, 359/350, 359/353, 359/351, 359/355
• US Class Current: 250/330
• CPC Class Codes: G01J 2003/1828 with order sorter or prefilter
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0286 Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
• CPC Class Codes: G01J 3/36 Investigating two or more bands of a spectrum by separate detectors
• CPC Class Codes: G01J 3/443 Emission spectrometry
• CPC Class Codes: G01J 5/061 by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
• CPC Class Codes: G02B 21/00 Microscopes
• CPC Class Codes: G02B 21/365 Control or image processing arrangements for digital or video microscopes G02B21/361, G02B21/362 take precedence

Abstract

A multiwavelength imaging and spectroscopic photoemission microscope system (100) which simultaneously provides images in a broad range of the electromagnetic spectrum, such as between 200 nm-1000 nm (optical or visible light) and 1000 nm-500 nm (infrared light). The multiwavelength imaging and spectroscopic photoemission microscope system comprises a microscope (102), a spectrometer (106), a beam splitter (108), a first spectrum focal plane array (110) including an appropriate photodiode (114A), a second spectrum focal plane array (120) including an appropriate photodiode (114B), and a cryogenic vessel (160) to maintain relevant portions of the system at a very low temperature. The invention may be used in failure analysis of integrated circuits and in semiconductor and low temperature physics.

Claims

1. A multiwavelength imaging system, comprising:

a. microscope configured to view electromagnetic radiation emitted from an object;

b. a spectrometer configured to receive the electromagnetic radiation viewed by the microscope, and having a retractable grating configured to separate the received electromagnetic radiation according to wavelength into three separate spectral bands;

c. a beam splitter configured to receive the electromagnetic radiation separated by the retractable grating and to direct infrared spectrum light to an infrared focal plane array and visible spectrum light to a visible focal plane array;

d. the infrared focal plane array configured to receive infrared light from the beam splitter and to convert the infrared light into electronic information; and

e. the visible focal plane array configured to receive visible light from the beam splitter and to convert the visible light into electronic information.

2. The system of claim 1, further comprising a cryogenic vessel configured to maintain the beam splitter and the infrared focal plane array at a very low temperature.

3. The system of claim 2, further comprising an infrared light band pass filter between the beam splitter and the infrared focal plane array and configured to filter the infrared light from the beam splitter and to direct the filtered light to the infrared focal plane array and the cryogenic vessel is configured to maintain the infrared light band pass filter at a very low temperature.

4. The system of claim 1, further comprising a visible light band pass filter between the microscope and the spectrometer and configured to filter the electromagnetic radiation viewed by the microscope and direct the filtered light to the spectrometer.

5. The system of claim 1, further comprising an infrared light band pass filter between the beam splitter and the infrared focal plane array and configured to filter the infrared light from the beam splitter and to direct the filtered light to the infrared light focal plane array.

6. A method for simultaneously obtaining images of a wide spectrum of electromagnetic radiation emitted by an object, the method comprising the steps of:

a. receiving electromagnetic radiation emitted from the object;

b. using a spectrometer having a retractable grating configured to separate the received electromagnetic radiation according to wavelength into three separate spectral bands including ultraviolet light, infrared light and visible light;

c. directing the infrared light to an infrared focal plane array;

d. directing the visible light to a visible focal plane array; and

e. electronically processing outputs of the visible and infrared focal plane arrays.

7. The method of claim 6, further comprising the step of maintaining the infrared focal plane array at a very low temperature.

8. The method of claim 6, wherein the step of separating further comprises the step of using a beam splitter for separating the electromagnetic energy.