Group-delay-dispersive multilayer-mirror structures and method for designing same

• US 6,222,673 B1
• Filed: 08/18/1998
• Issued: 04/24/2001
• Est. Priority Date: 08/18/1998
• Status: Expired due to Term

• Current Assignee: Coherent Inc (Coherent Corp.)
• Original Assignee: Coherent Inc (Coherent Corp.)
• Inventors: Austin, R. Russel, Edmond, R. Ian
• Primary Examiner(s): Spyrou, Cassandra
• Assistant Examiner(s): CHANG, AUDREY Y
• Application Number:
  US09/135,972
• Time in Patent Office: 980 Days
• Field of Search: 359/584, 359/586, 359/587, 359/588, 359/589, 372/93, 372/99
• US Class Current: 359/584
• CPC Class Codes: G02B 5/0858 the reflecting layers comprising a single metallic layer with one or more dielectric layers
• CPC Class Codes: G02B 5/0883 with a refractive index gradient rugate filters G02B5/289

Abstract

Negative Group-delay-dispersion mirror (NGDD-mirror) multilayer structures include a generally-orderly arrangement of layers or groups of layers in which the function of certain individual layers or groups of layers can be recognized and defined. The structures are broadly definable as a rear group of layers which are primarily responsible for providing a desired reflection level and reflection bandwidth together with a low and smoothly varying reflection phase-dispersion, and a front group of layers which are primarily responsible for producing high reflection phase-dispersion necessary for providing a desired NGDD level and bandwidth. The front group of layers relies on multiple resonant trapping mechanisms such as two or more effective resonant-cavities, employing one or more sub-quarter-wave layers to shape the phase-dispersion for providing a substantially-constant NGDD. In certain embodiments of the structures, a base layer or substrate of a highly-reflective metal can be used to reduce the number of dielectric layers needed to provide high reflectivity.

Claims

1. A multilayer mirror for providing greater than a selected high reflectivity value and substantially-constant negative group-delay-dispersion over a selected band of wavelengths, comprising:

a substrate;

first and second pluralities of layers disposed on said substrate, with said second plurality of layers superposed on said first plurality of layers;

said first plurality of layers functioning primarily to provide said high reflectivity; and

said second plurality of layers arranged such that selective resonant trapping of wavelengths within the band of wavelengths occurs in at least two longitudinally spaced-apart cavity groups of one or more layers within said second plurality of layers in such a way that said second plurality of layers functions primarily to provide a high reflection phase-dispersion for the mirror within the selected band of wavelengths and, cooperative with said first plurality of layers, to provide that said reflection phase-dispersion constantly increases over the selected band of wavelengths from about the shortest wavelength thereof to about the longest wavelength thereof, in a way which provides the substantially-constant negative group-delay-dispersion across the selected band of wavelengths.

2. The mirror of claim 1, wherein layers in said first and second pluralities are layers of materials transparent to said selected band of wavelengths, and adjacent layers have a different refractive index.

3. The mirror of claim 2, wherein said first plurality of layers further includes a metal layer, said metal layer being closest to said substrate.

4. The mirror of claim 2, wherein said substrate is a metal substrate having a polished surface on which said first and second pluralities of layers are deposited.

5. The mirror of claim 1, wherein said first plurality of layers is essentially a stack of alternating high and low refractive index dielectric materials, each thereof having an optical thickness of about one-quarter wavelength at wavelength within the selected range of wavelengths.

6. The mirror of claim 1, wherein each of said cavity-groups includes at least one layer having an optical thickness less than about one-quarter wavelength at a wavelength within the selected band of wavelengths.

7. The mirror of claim 1 wherein at least one of said cavity groups has an optical thickness of about one-half wavelength at a wavelength within the selected band of wavelengths.

8. A multilayer mirror for providing greater than a selected high reflectivity value and a substantially-constant negative group-delay-dispersion over a selected band of wavelengths, comprising:

a substrate;

first and second pluralities of layers disposed on said substrate, with said second plurality of layers superposed on said first plurality of layers;

said first plurality of layers functioning primarily to provide said high reflectivity and being essentially a quarter-wave stack of layers having about equal optical thickness, said optical thickness being about one-quarter wavelength at a wavelength within the selected band of wavelengths; and

said second plurality of layers arranged such that selective resonant trapping of wavelengths within the band of wavelengths occurs in at least two longitudinally spaced-apart cavity groups of one or more layers within said second plurality of layers in such a way that said second plurality of layers functions primarily to provide a high reflection phase-dispersion for the mirror within the selected band of wavelengths and, cooperative with said first plurality of layers, to provide that said reflection phase-dispersion constantly increases over the selected band of wavelengths from about the shortest wavelength thereof to about the longest wavelength thereof, in a way which provides the substantially-constant negative group-delay-dispersion across the band of wavelengths.

9. A multilayer mirror for providing greater than a selected high reflectivity value and a substantially-constant negative group-delay-dispersion over a selected band of wavelengths, comprising:

a substrate;

first and second pluralities of layers disposed on said substrate, with said second plurality of layers superposed on said first plurality of layers;

said first plurality of layers being alternating layers of a first material having a high refractive index and a second material having a low refractive index, said layers arranged to form a mirror having a reflection band at least as wide as the selected band of wavelengths and greater than a correspondingly-defined reflection band of a quarter-wave stack of said first and second materials; and

said second plurality of layers arranged such that selective resonant trapping of wavelengths within the band of wavelengths occurs in at least two longitudinally spaced-apart cavity groups of one or more layers within said second plurality of layers, each of said cavity groups including at least one layer having an optical thickness less than one quarter-wavelength optical thickness at a wavelength within the selected band of wavelengths, said selective resonant trapping occurring in such a way that said second plurality of layers functions primarily to provide a high reflection phase-dispersion for the mirror within the selected band of wavelengths and, cooperative with said first plurality of layers, to provide that said reflection phase-dispersion constantly increases over the selected band of wavelengths from about the shortest wavelength thereof to about the longest wavelength thereof, in a way which provides substantially-constant negative group-delay-dispersion across the band of wavelengths.

10. The mirror of claim 9, wherein said first plurality of layers includes first and second portions, said second portion furthest from said substrate and characterized in that all adjacent layer pairs therein have about the same optical thickness and wherein said first portion includes two or more spaced-apart layers having an optical thickness of between about three-eighths and seven-eighths of a wavelength at a wavelength within said selected band of wavelengths.

11. The mirror of claim 10, wherein all layers in said first portion of said first plurality of layers each have an optical thickness of about one-quarter wavelength at a wavelength within the selected band of wavelengths.

12. The mirror of claim 11, wherein said two or more spaced-apart layers having an optical thickness of between about three-eighths and seven-eighths of a wavelength at a wavelength within the selected band of wavelengths are spaced apart by layers having an optical thickness of about one-quarter wavelength at a wavelength within the selected band of wavelengths.

13. The mirror of claim 11, wherein between said two or more spaced-apart layers having an optical thickness of between about three-eighths and seven-eighths of a wavelength at a wavelength within the selected band of wavelengths are layers having an optical thickness less than about one-quarter wavelength at a wavelength within the selected band of wavelengths.

14. The mirror of claim 10, wherein adjacent ones of said second plurality of layers have a different refractive index and any one layer is a layer of a material having one of a high refractive index, a low refractive index, and a refractive index intermediate said high and low refractive indices.

15. A multilayer mirror for providing greater than a selected high reflectivity value and a substantially-constant negative group-delay-dispersion over a selected band of wavelengths in an intended direction of light incidence thereon, comprising:

a substrate;

first and second pluralities of layers disposed on said substrate, with said second plurality of layers superposed on said first plurality of layers;

said first plurality of layers functioning primarily to provide said high reflectivity value and including alternating layers of a material having a high refractive index and a material having a low refractive index, said layers arranged to form a mirror having a reflection band at least as wide as the selected band of wavelengths, and wherein said first plurality of layers alone, seen in the intended light-incidence direction of the mirror would have a phase-dispersion defined as reflection phase-shift as a function of wavelength varying by no greater than π

/2 over said selected band of wavelengths, the form of said reflection-phase-shift function being smoothly and monotonically varying, said high and low index values of said first plurality of layers being such that a quarter-wave-stack of such layers having a center wavelength within said selected band of wavelengths would have a bandwidth about equal to or less than the selected band of wavelengths; and

said second plurality of layers arranged such that selective resonant trapping of wavelengths within the band of wavelengths occurs in at least two longitudinally spaced-apart cavity groups of one or more layers within said second plurality of layers, each of said cavity groups including at least one layer having an optical thickness less than one quarter-wavelength optical thickness at a wavelength within the selected band of wavelengths, said selective resonant trapping occurring in such a way that said second plurality of layers functions primarily to provide a high reflection phase-dispersion for the mirror within the selected band of wavelengths and, cooperative with said first plurality of layers, to provide that said reflection phase-dispersion constantly increases over the selected band of wavelengths from about the shortest wavelength thereof to about the longest wavelength thereof, in a way which provides substantially-constant negative group-delay-dispersion across the selected band of wavelengths.

16. The mirror of claim 15, wherein said high phase-dispersion created by said second plurality of players is greater than about π

over the selected band of wavelengths.

17. The mirror of claim 15, wherein said second plurality of wavelengths includes alternating layers of a high refractive index material and a low refractive index material.

18. The mirror of claim 17, wherein said high and low refractive index materials of said second plurality of layers are respectively the same as said high and low refractive index materials of said first plurality of layers.