Probe needle arrangement and movement method for use in an atomic force microscope

• US 6,223,591 B1
• Filed: 11/27/1998
• Issued: 05/01/2001
• Est. Priority Date: 11/28/1997
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Nakano, Katsushi
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US09/200,437
• Time in Patent Office: 886 Days
• Field of Search: 73/105, 250/306, 250/307
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip

Abstract

A probe microscope including a probe needle arrangement having a probe needle part, and a detection part connected to, and formed along the same axis as, the probe needle part; a displacement detector that detects changes in a condition of the probe needle part; and a movement device that drives the probe needle arrangement relative to a sample surface to be measured.

Claims

1. A method for detecting an interaction force between a probe needle arrangement and a sample surface, the method comprising the steps of:

generating a torsional resonant vibration centered on an axis within the probe needle arrangement, the axis passing along the length of the probe needle arrangement and being substantially perpendicular to the sample surface; and

detecting the interactive force from changes in the torsional resonant vibration.

2. The method as claimed in claim 1, wherein the generating step generates the torsional resonant vibration by a mechanical excitation of the probe needle arrangement.

3. The method as claimed in claim 1, wherein the generating step generates the torsional resonant vibration using an electromagnetic force.

4. The method as claimed in claim 1, wherein the detecting step detects the interactive force from changes in the amplitude of the torsional resonant vibration.

5. The method as claimed in claim 1, wherein the detecting step detects the interactive force from changes in the resonant frequency of the torsional resonant vibration.

6. The method as claimed in claim 1, wherein the detecting step involves optical detection.

7. The method as claimed in claim 1, wherein the detecting step involves electromagnetic detection.

8. A probe needle arrangement movement method in a probe microscope, the method comprising the steps of:

exciting a torsional resonant vibration in the probe needle arrangement;

moving the probe needle arrangement relative to a sample;

detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration; and

determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change in the interactive force when a change in the interactive force is detected.

9. The method as claimed in claim 8, wherein the exciting step excites the torsional resonant vibration by a mechanical excitation of the probe needle arrangement.

10. The method as claimed in claim 8, wherein the exciting step excites the torsional resonant vibration using an electromagnetic force.

11. The method as claimed in claim 8, wherein the detecting step detects the changes in the interactive force by detecting changes in the vibrational amplitude of the torsional resonant vibration.

12. The method as claimed in claim 8, wherein the detecting step detects the changes in the interactive force by detecting changes in the resonant frequency of the torsional resonant vibration.

13. A method of imaging the surface profile of a sample using a probe needle arrangement of a probe microscope, the method comprising the steps of:

generating a torsional resonant vibration in the probe needle arrangement;

moving the probe needle arrangement towards the sample;

detecting changes in an interaction force between the probe needle arrangement and the sample by detecting changes in the torsional resonant vibration;

determining a further direction of movement of the probe needle arrangement in relation to a current placement of the probe needle arrangement and an amount of change of the current interaction force each time a change in the interaction force is detected;

storing data corresponding to each of the new directions of movement determinations in a memory unit; and

imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.

14. A method of imaging a surface profile of a sample using a probe of a probe microscope, the method comprising the steps of:

moving the probe towards the sample;

detecting changes in an interaction force between the probe and the sample;

determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected;

storing data corresponding to each of the new directions of movement determinations in a memory unit; and

imaging the surface profile of the sample from the data corresponding to each of the further directions of movement determinations stored in the memory unit.

15. A probe microscope having a probe for imaging a surface profile of a sample, comprising:

a movement device for driving the probe relative to a sample surface to be measured;

a displacement detector for detecting changes in an interaction force between the probe and the sample;

a determining section for determining a new direction of movement of the probe in relation to a current placement of the probe and an amount of change of the interaction force each time a change in the interaction force is detected;

a memory for storing data corresponding to each of the new direction of movement determinations in a memory unit; and

an imaging section for imaging the surface profile of the sample from the data corresponding to each of the new direction of movement determinations stored in the memory unit.

16. The probe microscope of claim 15, wherein the probe is a pointed non-contact probe.