Method for positioning substrate

• US 6,225,012 B1
• Filed: 02/08/2000
• Issued: 05/01/2001
• Est. Priority Date: 02/22/1994
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Okumura, Masahiko, Kida, Yoshiki, Nishi, Kenji
• Primary Examiner(s): Young, Christopher G.
• Application Number:
  US09/500,244
• Time in Patent Office: 448 Days
• Field of Search: 430/5, 430/22, 430/30
• US Class Current: 430/22
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces
• CPC Class Codes: G03F 9/7011 Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder
• CPC Class Codes: G03F 9/7046 Strategy, e.g. mark, sensor or wavelength selection

Abstract

A method for positioning a wafer with respect to a reticle in a projection exposure apparatus for a photolithographic process capable of high speed search alignment of a wafer without any limitation imposed on the arrangement of the search marks on the wafer. For the first wafer in one lot, a first alignment sensor system is used to detect the positions of first and second search marks, and define a coordinate system with reference to the positions of the search marks based on the detection results. Then, while the first search mark is detected by the first alignment sensor system, the position of a street-line is detected by a second alignment sensor system and stored. For any of the second and later wafers in the lot, while the first search mark is detected by the first alignment sensor system, the position of a street-line is detected by the second alignment sensor system, and the offsets between the detected position and the stored position are used to define a coordinate system which refers to the search marks.

Claims

1. A method for positioning a substrate on a two-dimensionally movable substrate stage, said substrate having a peripheral edge with a cutout formed therein, said method comprising the steps of:

(a) transferring said substrate to a loading position above said substrate stage;

(b) measuring, at said loading position, positions of a measurement point on said cutout formed in said peripheral edge of said substrate and of another measurement point on said peripheral edge of said substrate, by using a noncontact-measurement technique; and

(c) determining a positional error of said substrate at said loading position based on the measurement results obtained through said step (b); and

(d)) correcting said determined positional error while said substrate is moving from said loading position above said substrate stage onto said substrate stage.

2. A positioning method according to claim 1, further comprising the step of:

rotating said substrate to compensate for said rotational error before said substrate is placed onto said substrate stage.

3. A positioning method according to claim 1, wherein:

the positions of said measurement points are measured by using two-dimensional image processing technique.

15. A positioning method according to claim 1, wherein said cutout has a V-shaped configuration.

16. A positioning method according to claim 1, wherein said substrate has a peripheral edge with a V-shaped cutout formed therein.

4. A method for positioning a substrate on a two-dimensionally movable substrate stage, comprising the steps of:

(a) forming on each substrate first and second search marks each for indicating a two-dimensional position;

(b) detecting two-dimensional positions of said first and second search marks on a first substrate;

(c) determining a rotational error of said first substrate based on the two-dimensional positions detected through said step (b);

(d) detecting and storing an at least one-dimensional position of a pattern spaced a predetermined distance from said first search mark on said first substrate, while detecting a two-dimensional position of said first search mark;

(e) detecting an offset, from the position stored through said step (d), of said pattern spaced said predetermined distance from said first search mark, while detecting a two-dimensional position of said first search mark on a second substrate on said substrate stage, so as to determine from said offset positional error of an offset positional error of said second substrate.

5. A positioning method according to claim 4, wherein:

said steps (b), (c), (d) and (e) are performed on the first substrate in one lot.

6. A method for positioning a substrate on a two-dimensionally movable substrate stage, said substrate having a peripheral edge with a cutout formed therein, said method comprising the steps of:

(a) transferring said substrate to a loading position above said substrate stage;

(b) measuring, at said loading position, positions of a measurement point on said cutout formed in said peripheral edge of said substrate and another measurement point on said peripheral edge of said substrate, by using a two-dimensional image processing system and a noncontact-measurement technique;

(c) determining, in said observation fields of said two-dimensional image processing system, imaginary points corresponding to reference points which would be used for positioning said substrate on said substrate stage by using a contact-positioning technique; and

(d) using offsets, from said imaginary points, of the positions of said measurement points measured by said two-dimensional image processing system, to make a prediction of a position of said substrate which will be found when said substrate has been placed on said substrate stage.

7. A positioning method according to claim 6, wherein:

said prediction of the position of said substrate in said step (d) is made not only using said offsets, from said imaginary points, of the positions of said measurement points measured by said two-dimensional image processing system, but also using measured coordinates of a rotational center of a substrate lift means for setting said substrate from said loading position onto said substrate stage while rotating said substrate by a desired angle.

8. A positioning method according to claim 6, further comprising the step of;

positioning said substrate, based on results of said prediction, to a location on said substrate stage to which said substrate would be positioned when said substrate is positioned by using said contact-alignment technique.

9. A positioning method according to claim 6, wherein:

said cutout formed in said peripheral edge of said substrate comprises a V-shaped cutout, and

said measurement points whose positions are measured by said two-dimensional image processing system include one measurement point on said cutout and two measurement points on other portions of said peripheral edge of said substrate.

10. A positioning method according to claim 6, wherein:

said cutout formed in said peripheral edge of said substrate comprises a flat edge portion, and

said measurement points whose positions are measured by said two-dimensional image processing system include one measurement point on said cutout and two measurement points on other portions of said peripheral edge of said substrate.

11. A positioning method according to claim 6, further comprising the steps of:

in order to make said prediction of the position of said substrate which will be found when said substrate has been placed on said substrate stage, obtaining a rotational error and offsets between a position of said substrate which will be found when said substrate has been placed on said substrate stage through said substrate lift means without any rotation effected thereby and a position of said substrate which would be found when said substrate had been positioned by using said contact-positioning technique; and

correcting said rotational error when said substrate is placed onto said substrate stage through said substrate lift means, and correcting said offsets through said substrate stage after said substrate has been placed on said substrate stage.

12. A positioning method according to claim 7, further comprising the steps of:

in order to make said prediction of the position of said substrate which will be found when said substrate has been placed on said substrate stage, obtaining a rotational error and offsets between a position of said substrate which will be found when said substrate has been placed on said substrate stage through said substrate lift means without any rotation effected thereby and a position of said substrate which would be found when said substrate had been positioned by using said contact-positioning technique; and

correcting said rotational error when said substrate is placed onto said substrate stage through said substrate lift means, and correcting said offsets through said substrate stage after said substrate has been placed on said substrate stage.

13. A positioning method according to claim 6, wherein:

said imaginary points are determined by calculations.

14. A positioning method according to claim 6, further comprising the step of:

transferring an image of a pattern formed on a mask onto said substrate placed on said substrate stage.

17. A positioning method in which a substrate is positioned relative to a substrate stage which is movable with said substrate mounted thereon, said method comprising the steps of:

transferring said substrate to an off-position at which said substrate is not mounted on said substrate stage;

detecting positions of a V-shaped cutout formed in said substrate and of another point on a peripheral edge of said substrate at said off-position; and

correcting said position of said substrate based on the detected position of said substrate while said substrate is moving from said off-position to an on-position at which said substrate is placed on said substrate stage.

18. A positioning method according to claim 17, wherein said detection of the position of said substrate is preformed by a noncontact-measurement technique.

19. A positioning method according to claim 17, further comprising a step of correcting the position of said substrate based on the detected position of the substrate.

20. A positioning method according to claim 19, wherein said correction of the position of said substrate is performed while said substrate is transferred from said off-position to said on-position.

21. A positioning method according to claim 18, wherein said detection of the position by said noncontact-measurement technique is performed by using a two-dimensional image processing system.

22. A positioning method according to claim 21, wherein an imaginary point corresponding to a reference point which would be used to position said substrate on said substrate stage by using a contact-positioning technique is set in said two-dimensional image processing system.

23. A positioning method according to claim 17, wherein said off-position is above said substrate stage.

24. An exposure method which exposes a substrate placed on a movable substrate stage with a pattern, said method comprising the steps of:

transferring a substrate to an off-position at which said substrate is not mounted on said substrate stage;

detecting positions of a V-shaped cutout formed in said substrate and of another point on a peripheral edge of said substrate at said off-position;

correcting said position of said substrate based on the detected position of said substrate while said substrate is moving from said off-position to an on-position at which said substrate is placed on said substrate stage; and

exposing said substrate with said pattern.

25. An exposure method according to claim 24, wherein said detection of the position of said substrate is performed by a noncontact-measurement technique.

26. An exposure method according to claim 24, further comprising a step of correcting the position of said substrate based on the detected position of said substrate.

27. An exposure method according to claim 26, wherein said correction of the position of said substrate is performed while said substrate is transferred from said off-position to said on-position.

28. An exposure method according to claim 25, wherein said detection of the position by said noncontact-measurement technique is performed by using a two-dimensional image processing system.

29. An exposure method according to claim 24, wherein said off-position is above said substrate stage.

30. A substrate which is exposed with a pattern by using the method set forth in claim 24.

31. A method for positioning a substrate having a geometrical feature, said method comprising the steps of:

measuring said geometrical feature of said substrate and determining a first offset of said substrate with respect to a first reference based on the measured result;

correcting position of said substrate so as to compensate said first offset;

measuring an alignment mark formed on said substrate and determining a second offset of said alignment mark with respect to a second reference based on the measured result; and

changing said first reference if said second offset is determined as not falling within a predetermined allowable range.

32. A method according to claim 31, wherein:

each of said first and second offsets is an offset in a rotational direction.