Active matrix display device using aluminum alloy in scanning signal line or video signal line
First Claim
Patent Images
1. An active matrix display device comprising a plurality of pixels arranged in matrix and each having a pixel electrode and a thin film transistor,said thin film transistor including:
- a gate electrode electrically connected to a scanning signal line;
a first insulating film formed on said gate electrode;
a semiconductor layer formed above said first insulating film;
a source electrode formed on said semiconductor layer and electrically connected to said pixel electrode; and
a drain electrode formed on said semiconductor layer and electrically connected to a video signal line, wherein each of said scanning signal line and said gate electrode is made of an alloy of Al containing Ta, and a second insulating film formed of an anodized oxide film of said scanning signal line or said gate electrode is formed on the surface of at least one of said scanning signal line and said gate electrode.
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Abstract
An anodized oxide film of Al is formed on a scanning signal line and a gate electrode. Al—Ta is used as material of each of the scanning signal line and gate electrode. The thickness of the anodized oxide film is set to at least 1,000 angstroms. The fabrication yield and reliability can be improved.
54 Citations
33 Claims
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1. An active matrix display device comprising a plurality of pixels arranged in matrix and each having a pixel electrode and a thin film transistor,
said thin film transistor including: -
a gate electrode electrically connected to a scanning signal line;
a first insulating film formed on said gate electrode;
a semiconductor layer formed above said first insulating film;
a source electrode formed on said semiconductor layer and electrically connected to said pixel electrode; and
a drain electrode formed on said semiconductor layer and electrically connected to a video signal line, wherein each of said scanning signal line and said gate electrode is made of an alloy of Al containing Ta, and a second insulating film formed of an anodized oxide film of said scanning signal line or said gate electrode is formed on the surface of at least one of said scanning signal line and said gate electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to corresponding scanning signal line, pixel electrode and video signal line, respectively, said scanning signal line and said gate electrode being each made of a metal containing Al as main constituent, and an anodized oxide film of said scanning signal line or said gate electrode being formed on a surface of at least one of said scanning signal line and said gate electrode, wherein a metal containing Al as main constituent is used as a material of a gate terminal connected with said scanning signal line, the side of said gate terminal is covered with an insulating film, and the top of said gate terminal is covered with a different conductive film of a material different from that of said gate terminal.
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18. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to corresponding scanning signal line, pixel electrode and video signal line, respectively, said scanning signal line and said gate electrode being each made of a metal containing Al as main constituent, and an anodized oxide film of said scanning signal line or said gate electrode being formed on the surface of at least one of said scanning signal line and said gate electrode, wherein said video signal line is made of an alloy of Al containing Ta.
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20. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to a corresponding scanning signal line, a corresponding pixel electrode and a corresponding video signal line, respectively, said scanning signal line and said gate electrode being each made of a metal containing Al as the main constituent, wherein a gate terminal connected with said scanning signal line is comprised of a metal containing Al as the main constituent, wherein a side wall surface of said gate terminal is overlaid with an insulating film and wherein an upper surface of said gate terminal exposed from said insulating film is overlaid with a transparent conductive film.
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24. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to a corresponding scanning signal line, a corresponding pixel electrode and a corresponding video signal line, respectively, said scanning signal line and said gate electrode being each-made of a metal containing Al as the main constituent, wherein a gate terminal connected with said scanning signal line is comprised of a metal containing Al— - Ta, and wherein said gate terminal is overlaid with a transparent conductive film.
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29. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to a corresponding scanning signal line, a corresponding pixel electrode and a corresponding video signal line, respectively, said scanning signal line and said gate electrode being each made of a metal containing Al as the main constituent, wherein a gate terminal connected with said scanning signal line is comprised of a metal containing Al— - Ta, wherein a side wall surface of said gate terminal is overlaid with an insulating film and wherein an upper surface of said gate terminal exposed from said insulating film is overlaid with a transparent conductive film.
- View Dependent Claims (30, 31)
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32. An active matrix display device comprising a plurality of scanning signal lines extending in a first direction, a plurality of video signal lines extending in a second direction, and pixels each including a pixel electrode and a thin film transistor, each pixel being disposed in a region surrounded by one of said plurality of scanning signal lines, a scanning signal line adjacent thereto, one of said plurality of video signal lines and a video signal line adjacent thereto,
said thin film transistor having its gate electrode, source electrode and drain electrode electrically connected to a corresponding scanning signal line, a corresponding pixel electrode and a corresponding video signal line, respectively, said scanning signal line and said gate electrode being each made of a metal containing Al as the main constituent, and said scanning signal line being connected to a gate terminal, wherein said active matrix display device further includes means for preventing said gate terminal from corroding, including the gate terminal being comprised of Al— - Ta and an upper surface of the gate terminal being overlaid with a transparent conductive film.
- View Dependent Claims (33)
Specification