Three-dimensional microstructures, and methods for making three-dimensional microstructures

• US 6,226,120 B1
• Filed: 11/30/1994
• Issued: 05/01/2001
• Est. Priority Date: 11/30/1994
• Status: Expired due to Fees

• Current Assignee: Board of Supervisors of Louisiana State University Agricultural & Mechanical College (Louisiana State University System)
• Original Assignee: Board of Supervisors of Louisiana State University Agricultural & Mechanical College (Louisiana State University System)
• Inventors: Feldman, Martin
• Primary Examiner(s): NGUYEN, THONG Q
• Application Number:
  US08/347,804
• Time in Patent Office: 2,344 Days
• Field of Search: 359/362-363, 359/399, 359/403, 359/618-624, 359/642, 351/41, 351/47, 351/57, 351/58, 351/158
• US Class Current: 359/399
• CPC Class Codes: G02B 23/00 Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
• CPC Class Codes: G02B 3/005 arranged along a single direction only, e.g. lenticular sheets G02B3/0043 takes precedence
• CPC Class Codes: G02B 3/0056 arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085

Abstract

Methods are disclosed for making microstructures. In one method, the resist layer is reversibly deformed during exposure. When the resist is flattened and developed after exposure, non-vertical features result that are not obtainable through other existing means. One application of this method is to make nested cones suitable for use as a highly efficient x-ray lens. In another disclosed method, “halftone” lithography is used to generate microstructures having features whose height may vary continuously. One application of this method is to make a novel telescope array, a thin film having telescopic magnification properties.

Claims

1. Eyeglasses comprising an eyeglass frame adapted to be worn by a human and two arrays of optical telescopes, wherein each of said arrays is held by said eyeglass frame, wherein each of said arrays comprises at least ten optical telescopes, and wherein:

(a) each of said telescopes is formed from an optically transparent material, and each of said telescopes comprises a front, convex surface and a back, concave surface;

wherein the axis of each said telescope is defined to be the line joining the center of the front, convex surface and the center of the back, concave surface of said telescope;

(b) each of said convex and concave surfaces is between 0.1 mm and 1.0 mm in diameter;

(c) the distance between the center of the front, convex surface and the center of the back, concave surface of each of said telescopes, measured along the axis, is between 0.1 mm and 10 cm; and

(d) said telescopes are held together so that the axes of adjacent telescopes are parallel to one another, or nearly parallel to one another;

with the front, convex surfaces of adjacent telescopes facing the same direction, or nearly the same direction.

2. Eyeglasses as recited in claim 1, wherein each of said arrays additionally comprises opaque regions between said telescopes to inhibit light from one of said telescopes entering another of said telescopes.

3. Eyeglasses as recited in claim 1, wherein said telescopes are hexagonally packed with respect to one another.

4. Eyeglasses as recited in claim 1, wherein the diameter of each of said convex surfaces and said concave surfaces is about 0.25 mm.

5. Eyeglasses as recited in claim 1, wherein a hypothetical surface connecting the centers of the front, convex surfaces of the telescopes of each of said arrays is curved, whereby each said array has the refraction of a lens that is similarly curved, in addition to the magnification of said telescopes.

6. A combination comprising two arrays of optical telescopes and two video displays, wherein each of said arrays comprises at least ten optical telescopes, wherein each of said video displays is adapted to produce an image, wherein each of said arrays receives an image produced by one of said video displays, and wherein:

(a) each of said telescopes is formed from an optically transparent material, and each of said telescopes comprises a front, convex surface and a back, spherical surface;

wherein the axis of each said telescope is defined to be the line joining the center of the front, convex surface and the center of the back, spherical surface of said telescope;

(b) each of said front and back surfaces is between 0.1 mm and 1.0 mm in diameter;

(c) the distance between the center of the front, convex surface and the center of the back, spherical surface of each of said telescopes, measured along the axis, is between 0.1 mm and 10 cm; and

(d) said telescopes are held together so that the axes of adjacent telescopes are parallel to one another, or nearly parallel to one another;

with the front, convex surfaces of adjacent telescopes facing the same direction, or nearly the same direction;

whereby a user of said combination, viewing through said arrays, will see a magnification of the images produced by the video displays.

7. An apparatus for viewing a dim initial visible-light image, comprising an electronic amplifier of the initial visible-light image, and a combination as recited in claim 6, wherein said electronic amplifier detects and amplifies the initial visible-light image and transmits a signal corresponding to the amplified image to each of said video displays, and wherein each of said video displays is adapted to transform the signal into the image produced by said video display, whereby a viewer using said apparatus will see an amplified image of the initial visible-light image.

8. An apparatus for viewing an infrared image, comprising an electronic amplifier of an infrared image, and a combination as recited in claim 6, wherein said electronic amplifier detects and amplifies the infrared image, and transmits a signal corresponding to the amplified image to each of said video displays, and wherein each of said video displays is adapted to transform the signal into a visible-light image produced by said video display, whereby a viewer using said apparatus will see an amplified visible-light image of the infrared image.