Inflatable compliant bladder assembly

• US 6,228,233 B1
• Filed: 11/30/1998
• Issued: 05/08/2001
• Est. Priority Date: 11/30/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lakshmikanthan, Jayant, Stevens, Joe
• Primary Examiner(s): Gorgos, Kathryn
• Assistant Examiner(s): Parsons, Thomas H.
• Application Number:
  US09/201,796
• Time in Patent Office: 890 Days
• Field of Search: 204/297 R, 204/277, 204/224 R, 118/428, 118/503
• US Class Current: 204/277
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/06 Suspending or supporting devices for articles to be coated
• CPC Class Codes: C25D 7/123 Semiconductors first coated with a seed layer or a conductive layer

Abstract

The present invention provides a bladder assembly 130 for use in an electroplating cell 100. The bladder assembly 130 comprises a mounting plate 132, a bladder 136, and an annular manifold 146. One or more inlets 142 are formed in the mounting plate 146 and are coupled to a fluid source 138. The manifold 146 is adapted to be received in a recess 140 formed in the lower face of the mounting plate 132 and secures the bladder 136 thereto. Outlets 154 formed in the manifold 146 communicate with the inlets 142 to route a fluid from the fluid source 138 into the bladder 136 to inflate the same. A substrate 121 disposed on a contact ring 114 opposite the bladder 136 is thereby selectively biased toward a seating surface of the contact ring 114. A pumping system 159 coupled at the backside of the substrate 121 provides a pressure or vacuum condition.

Claims

1. An inflatable bladder assembly for loading a substrate in an electroplating cell, the inflatable bladder assembly comprising:

a) a substrate mounting plate comprising one or more fluid inlets;

b) an inflatable bladder secured to the substrate mounting plate and in communication with the one or more fluid inlets;

c) a fluid source coupled to the one or more fluid inlets;

d) a port formed in the substrate mounting plate; and

e) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure.

2. The inflatable bladder assembly of claim 1, wherein the inflatable bladder comprises an elastomer.

3. The inflatable bladder assembly of claim 1, wherein the inflatable bladder comprises an elastomer resistant to fluid diffusion and attack.

4. The inflatable bladder assembly of claim 1, wherein the inflatable bladder is tubular and comprises one or more valves disposed through the one or more fluid inlets and coupled to the fluid source.

5. The inflatable bladder assembly of claim 1, further comprising a manifold fastened to the substrate mounting plate, a portion of the inflatable bladder being disposed therebetween and wherein the manifold comprises one or more fluid outlets to provide communication between the one or more fluid inlets and the inflatable bladder.

6. The inflatable bladder assembly of claim 5, wherein the manifold is annular.

7. The inflatable bladder assembly of claim 5, wherein the substrate mounting plate comprises a recess for receiving the manifold therein.

8. The inflatable bladder assembly of claim 7, wherein the inflatable bladder comprises a semi-tubular piece of material comprising lip seals disposed along each edge thereof, wherein the lip seals are compressedly disposed between the manifold and the substrate mounting plate to seal the inflatable bladder.

9. The inflatable bladder assembly of claim 1, Other comprising an electrode contact ring having a substrate seating surface disposed opposite the substrate mounting plate.

10. The inflatable bladder assembly of claim 9, wherein the inflatable bladder is disposed opposite the substrate seating surface.

11. The inflatable bladder assembly of claim 9, further comprising a substrate having a first side disposed on the substrate seating surface and a second side opposite the inflatable bladder, whereby the inflatable bladder selectively biases the substrate toward the substrate seating surface.

12. The inflatable bladder assembly of claim 1, further comprising a plurality of grooves formed in the substrate mounting plate and in communication with the port.

13. The inflatable bladder assembly of claim 1, wherein the substrate mounting plate is adapted to bow the substrate away from the substrate mounting plate.

14. The inflatable bladder assembly of claim 1, wherein the substrate mounting plate is adapted to vacuum chuck a substrate.

15. An inflatable bladder assembly for use in an electroplating cell apparatus, the inflatable bladder assembly comprising:

a) a substrate mounting plate having one or more inlets formed therein;

b) a manifold secured to the substrate mounting plate, the manifold having one or more outlets in fluid communication with the one or more inlets;

c) an inflatable bladder secured to the substrate mounting plate by the manifold, the inflatable bladder being in fluid communication with the one or more outlets;

d) a fluid source in communication with the one or more inlets;

e) a port formed in the substrate mounting plate; and

f) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure.

16. The inflatable bladder assembly of claim 15, wherein the inflatable bladder comprises an elastomer.

17. The inflatable bladder assembly of claim 15, wherein the inflatable bladder comprises an elastomer resistant to fluid diffusion and chemical deterioration.

18. The inflatable bladder assembly of claim 15, wherein the inflatable bladder is tubular and comprises one or more valves disposed through the one or more fluid inlets and coupled to the fluid source.

19. The inflatable bladder assembly of claim 15, wherein the inflatable bladder comprises a semi-tubular piece of material comprising lip seals disposed along each edge thereof, wherein the lip seals are compressedly disposed between the manifold and the substrate mounting plate to seal the inflatable bladder.

20. An apparatus for electroplating a substrate comprising:

a) an electroplating cell body;

b) an electrode disposed at a first end of the body;

c) a contact ring at least partially disposed within the cell body at a second end;

d) one or more power supplies coupled to the contact ring;

e) an inflatable bladder assembly disposed opposite the contact ring and comprising a substrate mounting plate and an inflatable bladder secured thereto;

f) a fluid source in communication with the inflatable bladder;

g) a port formed in the substrate mounting plate; and

h) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure.

21. The apparatus of claim 20, wherein the inflatable bladder assembly further comprises:

(a) one or more fluid inlets formed in the substrate mounting plate and coupled to the fluid source; and

(b) a manifold secured to the substrate mounting plate, the manifold having one or more fluid outlets providing fluid communication between the one or more fluid inlets and the inflatable bladder.

22. The apparatus of claim 21, wherein the inflatable bladder comprises an elastomer.

23. The inflatable bladder assembly of claim 21, wherein the inflatable bladder comprises an elastomer resistant to fluid diffusion and chemical attack.

24. The apparatus of claim 21, wherein the inflatable bladder is tubular and the one or more inlets comprise at least one valve coupled to the fluid source.

25. The apparatus of claim 21, wherein the inflatable bladder comprises a semi-tubular piece of material comprising lip seals disposed along each edge thereof, wherein the lip seals are compressedly disposed between the manifold and the substrate mounting plate to seal the inflatable bladder.

26. The apparatus of claim 21, wherein the inflatable bladder is at least partially disposed parallel to a substrate seating surface of the contact ring.

27. The apparatus of claim 21, further comprising a substrate comprising a first side disposed on the substrate seating surface and a second side disposed opposite the inflatable bladder, wherein the inflatable bladder may selectively bias the substrate toward the substrate seating surface.

28. A method for securing a substrate to a seating surface for processing in an electrolytic cell, comprising:

a) providing an inflatable bladder opposite the seating surface, wherein the inflatable bladder is secured to a substrate mounting member comprising a port, and wherein the port is coupled to a vacuum/pressure system capable of selectively applying a vacuum or pressure;

b) disposing the substrate on the seating surface by applying a vacuum to the port; and

c) inflating the inflatable bladder to bias the substrate onto the seating surface.

29. The method of claim 28, wherein the seating surface is disposed on a contact ring.

30. The method of claim 28, further comprising providing the inflatable bladder opposite a perimeter portion of the substrate.

31. The method of claim 28, wherein the inflatable bladder is inflated by flowing a fluid therein.

32. The method of claim 28, further comprising supplying a pressure at a backside of the substrate.

33. The method of claim 32, wherein supplying the pressure comprises supplying a fluid through the port diametrically interior to the inflatable bladder.

34. The method of claim 28, further comprising bowing the substrate by supplying a pressure through the port to a backside of the substrate.

35. The method of claim 34, wherein bowing the substrate comprises supplying a fluid through the port diametrically interior to the inflatable bladder.

36. An inflatable bladder assembly for use in a substrate processing apparatus, the inflatable bladder assembly comprising:

a) a mounting member;

b) an inflatable bladder disposed at least partially on the mounting member and positioned to contact the periphery of a substrate;

c) a port formed in the mounting member; and

d) a vacuum/pressure pumping system coupled to the port and capable of selectively supplying a vacuum or pressure to the backside of a substrate.