Method of manufacture of a thermally actuated ink jet printer having a series of thermal actuator units
First Claim
1. A method of manufacture of an ink jet printhead which includes:
- providing a substrate;
depositing a doped layer on the substrate and etching said layer to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle; and
utilizing planar monolithic deposition, lithographic and etching processes to create a paddle arranged in each nozzle chamber, each paddle being connected to a thermal bend actuator unit and the thermal bend actuator unit comprising a plurality of thermal bend devices arranged in spaced, parallel relationship.
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Accused Products
Abstract
A method of manufacture of an ink jet print head arrangement including a series of nozzle chambers is disclosed, the method comprising the steps of: (a) utilizing an initial semiconductor wafer having an electrical circuitry layer formed thereon; (b) etching the electrical circuitry layer so as to define a nozzle chamber area; (c) depositing and etching a first sacrificial layer, the etching defining a series of nozzle chamber walls and an actuator anchor point; (d) depositing a first heater material layer; (e) depositing an intermediate material layer; (f) etching the first heater material layer and the intermediate material layer to define portions of actuator, ejection paddle and nozzle chamber walls; (g) depositing and etching a second sacrificial layer, the etching including etching a cavity defining a portion of the nozzle chamber walls; (h) depositing and etching a further glass layer to define the roof of the nozzle chamber and the walls thereof; (i) etching an ink supply channel through the wafer to form a fluid communication with the nozzle chamber; (j) etching away remaining sacrifical material.
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Citations
15 Claims
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1. A method of manufacture of an ink jet printhead which includes:
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providing a substrate;
depositing a doped layer on the substrate and etching said layer to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle; and
utilizing planar monolithic deposition, lithographic and etching processes to create a paddle arranged in each nozzle chamber, each paddle being connected to a thermal bend actuator unit and the thermal bend actuator unit comprising a plurality of thermal bend devices arranged in spaced, parallel relationship. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacture of an ink jet printhead arrangement including a series of nozzle chambers, said method comprising the steps of:
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(a) utilising an initial semiconductor wafer having an electrical circuitry layer formed thereon;
(b) etching said electrical circuitry layer so as to define a nozzle chamber area;
(c) depositing and etching a first sacrificial layer, said etching defining a series of nozzle chamber walls and an actuator anchor point;
(d) depositing a first heater material layer;
(e) depositing an intermediate material layer;
(f) etching said first heater material layer and said intermediate material layer to define portions of an actuator, ejection paddle and nozzle chamber walls;
(g) depositing and etching a second sacrificial layer, said etching including etching a cavity defining a portion of the nozzle chamber walls;
(h) depositing and etching a further glass layer to define the roof of the nozzle chamber and the walls thereof;
(i) etching an ink supply channel through said wafer to form a fluid communication with said nozzle chamber; and
(j) etching away remaining sacrificial material. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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Specification