Broadband impedance matching probe
First Claim
1. A broad band impedance matching probe for testing electronic devices having a first end adapted for contacting a device to be tested, a second end adapted for connection to test instruments, a probe body having an inner electrical conductor, said inner electrical conductor being surrounded by an insulator, said insulator being surrounded by an electrically conducting shield, said inner conductor is tapered along the length of the probe body to provide an impedance that transforms the impedance of the test instruments at said second end to a different impedance at said first end, wherein said second end constitutes means for connection to said test instruments by the use of a coaxial connector.
1 Assignment
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Accused Products
Abstract
A probe for testing integrated circuits at microwave frequencies employs a tapered coaxial transmission line to transform the impedance at the probe tips to the impedance of the test instruments. Mechanically resilient probe tip structures allow reliable probing of non-planar circuits and the elastic probe body allows large overprobing without damage to the test circuit. Novel insulator structures for the coaxial line allow easy and accurate assembly and high performance.
351 Citations
17 Claims
- 1. A broad band impedance matching probe for testing electronic devices having a first end adapted for contacting a device to be tested, a second end adapted for connection to test instruments, a probe body having an inner electrical conductor, said inner electrical conductor being surrounded by an insulator, said insulator being surrounded by an electrically conducting shield, said inner conductor is tapered along the length of the probe body to provide an impedance that transforms the impedance of the test instruments at said second end to a different impedance at said first end, wherein said second end constitutes means for connection to said test instruments by the use of a coaxial connector.
- 6. A broad band impedance matching probe for testing electronic circuits having means on a first end for contacting a device to be tested, a second end having means for connection to test instruments, a probe body with an inner electrical conductor, said inner conductor being surrounded by an insulator, said insulator being surrounded by an electrically conducting shield, said shield having an inside dimension that is tapered along the length of the probe body to provide an impedance that transforms the impedance of the test instruments at said second end to a different impedance at said first end.
Specification