Microelectromechanical optical switch and method of manufacture thereof

• US 6,229,640 B1
• Filed: 08/11/1999
• Issued: 05/08/2001
• Est. Priority Date: 08/11/1999
• Status: Expired due to Term

• Current Assignee: CommScope Technologies, LLC (CommScope Holding Company, Inc.)
• Original Assignee: ADC Telecommunications Incorporated (TE Connectivity Limited)
• Inventors: Zhang, Nan
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US09/372,265
• Time in Patent Office: 636 Days
• Field of Search: 385/16, 385/17, 385/18, 385/19, 385/20, 385/21, 385/22, 385/23, 385/24, 359/223, 359/237, 359/290, 359/291
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81C 1/00182 Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B81C 2203/0136 Growing or depositing of a covering layer
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3544 2D constellations, i.e. with switching elements and switched beams located in a plane
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

A MEMS-based optical switch having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb drive actuator having a deflecting beam structure and a mirror coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

Claims

1. An optical switch formed on a substrate, comprising:

a pair of first waveguide channels and a pair of second waveguide channels disposed on the substrate;

a single comb drive actuator including a stationary comb mounted on the substrate, a moveable comb interleaved with the stationary comb, and a beam structure connected between the substrate and the moveable comb; and

a mirror coupled to the actuator, the mirror capable of being moved between an extended position interposed between the waveguide channels and a retracted position apart from the waveguide channels;

wherein the two combs apply a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended positions or the retracted position in the absence of the application of force between the two combs.

2. The optical switch of claim 1, further including an optical waveguide in each of the waveguide channels, wherein in the extended position, the mirror reflects light between each of the optical waveguides in the first pair of channels and a corresponding optical waveguide disposed in one of the second pair of channels and, in the retracted position, light transmits between the optical waveguides in the first pair of channels and between the optical waveguides in the second pair of channels without reflection by the mirror.

3. The optical switch of claim 2, wherein each of the optical waveguides includes a beaded end.

4. The optical switch of claim 1, wherein the mirror moves a vertical distance between the extended and retracted positions, the distance being at least 40 to 70 microns.

5. The optical switch of claim 1, wherein the beam structure includes a folded beam on each side of the actuator.

6. The optical switch of claim 1, wherein the two sets of interleaved combs define a gap between adjacent comb fingers, the gap defining a distance of 3 microns or less.

7. The optical switch of claim 1, wherein the combs include fingers having a width of about 3 microns or less.

8. The optical switch of claim 7, wherein the comb fingers have a surface roughness of 30 nm rms or less.

9. The optical switch of claim 1, wherein the mirror is disposed within a trench defined by the substrate, the mirror having sidewalls separated from sidewalls of the trench by about 20 to 25 microns.

10. The optical switch of claim 9, wherein the sidewalls of the mirror have a verticality of at least 90°

±

0.6°

.

11. The optical switch of claim 1 wherein the mirror has a depth of about 70 to 80 angstroms.

12. The optical switch of claim 11, wherein the mirror has a surface roughness of 30 nm rms or less.

13. The optical switch of claim 1, further including a lattice framework interconnecting one or more sides of the mirror with a base surface of the actuator.

14. An optical switch formed on a substrate, comprising:

a pair of first waveguides channels and a pair of second waveguide channels disposed on the substrate;

a single comb drive actuator including a stationary comb mounted on the substrate, a moveable comb interleaved with the stationary comb, and a beam structure connected between the substrate and the moveable comb, wherein the moveable and stationary combs have fingers with a width of 2-4 microns, a depth of 70 microns or more, and a surface roughness of 30 nm rms or less, adjacent fingers of the moveable and stationary combs being separated by 2-4 microns, and wherein the beam structure includes beams having a depth of 70 microns or more and at least one sidewall with a surface roughness of 30 nm rms or less and a verticality of at least 90°

±

0.6°

; and

a mirror, coupled to the actuator, having a width of 2-5 microns and sidewalls with a verticality of at least 90°

±

0.60° and

with a surface roughness of 30 nm rms or less, the mirror being disposed in a trench with each mirror sidewall being spaced from a trench sidewalls by a distance of 20 microns or more, the mirror capable of being moved between an extended position interposed between the waveguide channels and a retracted position apart from the waveguide channels;

wherein the two combs apply a force capable of deflecting the beam structure and moving the mirror to one of the extended position or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force between the two combs.

15. An optical switch package, comprising:

a housing;

a substrate disposed in the housing;

at least one optical switch disposed on the substrate, the optical switch including;

a pair of first waveguide channels and a pair of second waveguide channels disposed on the substrate;

a single comb drive actuator including a stationary comb mounted on the substrate, a moveable comb interleaved with the stationary comb, and a beam structure connected between the substrate and the moveable comb; and

a mirror coupled to the actuator, the mirror capable of being moved between an extended position interposed between the waveguide channels and a retracted position apart from the waveguide channels;

wherein the two combs apply a force capable of deflecting the beam structure and moving the mirror to one of the extended position or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force between the two combs; and

a waveguide disposed in each of the waveguide channels and extending from the mirror outward from the housing; and

a conductive lead extending from each of the two combs.

16. An optical switch formed on a substrate, comprising:

a plurality of channels disposed in the substrate, each channel having one or more flanges at the end thereof;

a mirror;

an actuator coupled to the mirror and configured to move the mirror between an extended position interposed between the channels and a retracted position apart from the channels; and

a waveguide disposed in each channel, each waveguide including an end portion having a beaded lens and a tapered wall which tapers to the beaded lens, wherein the tapered wall of each waveguide contacts a corresponding flange for positioning the waveguide within one of the channels.

17. An optical switch formed on a substrate, comprising:

a plurality of channels disposed in the substrate; and

a waveguide disposed in each of the channels, at least one waveguide having a lens portion at an end of the waveguide and a tapered wall which tapers towards the lens portion, wherein the tapered wall of the waveguide is disposed within one of the channels.

18. The optical switch of claim 17, wherein the lens portion has a beaded shape.

19. The optical switch of claim 17, wherein each channel has at least one flange at a first end of the channel, the tapered wall of the waveguide is disposed proximate to the corresponding flange for positioning the waveguide within one of the channels, the first ends of the channels form an intersect region, the waveguides being coupled in the intersect region.

20. The optical switch of claim 19, further comprising:

a mirror; and

an actuator coupled to the mirror and configured to move the mirror between a first position in the intersect region and a second position outside the intersect region.

21. The optical switch of claim 20, wherein the first position is an extended position, and the second position is a retracted position.