High voltage micromachined electrostatic switch
First Claim
1. A MEMS device driven by electrostatic forces, comprising:
- a microelectronic substrate supporting the MEMS device and defining a planar surface;
a substrate electrode forming a layer on the surface of said substrate;
a substrate contact attached to said substrate;
a moveable composite overlying said substrate electrode and having an electrode layer and a biasing layer, said moveable composite having a fixed portion attached to the underlying substrate, and a distal portion movable with respect to said substrate electrode;
a composite contact attached to said moveable composite; and
an insulator electrically separating said substrate electrode from said moveable electrode, whereby said composite contact and said substrate contact are electrically connected when said moveable composite distal portion is attracted to said substrate.
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Accused Products
Abstract
A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. This device can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a microelectronic substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a moveable composite overlying the substrate, one or more composite contacts, and at least one insulator. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Applying a voltage between the substrate electrode and moveable composite electrode creates an electrostatic force that attracts the moveable composite to the underlying microelectronic substrate. The substrate contact and composite contact are selectively interconnected in response to the application of electrostatic force. Once electrostatic force is removed, the moveable composite reassumes the biased position such that the substrate and composite contacts are disconnected. Various embodiments further define components of the device. Other embodiments further include a source of electrical energy, a diode, and a switching device connected to different components of the MEMS device. A method of using the aforementioned electrostatic MEMS device is provided.
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Citations
42 Claims
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1. A MEMS device driven by electrostatic forces, comprising:
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a microelectronic substrate supporting the MEMS device and defining a planar surface;
a substrate electrode forming a layer on the surface of said substrate;
a substrate contact attached to said substrate;
a moveable composite overlying said substrate electrode and having an electrode layer and a biasing layer, said moveable composite having a fixed portion attached to the underlying substrate, and a distal portion movable with respect to said substrate electrode;
a composite contact attached to said moveable composite; and
an insulator electrically separating said substrate electrode from said moveable electrode, whereby said composite contact and said substrate contact are electrically connected when said moveable composite distal portion is attracted to said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41)
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42. A method of using a MEMS device solely supported by a microelectronic substrate having a substrate electrode and a substrate contact, and a moveable composite having an electrode layer and a composite contact, said moveable composite movable in response to an electrostatic force created between the substrate electrode and the electrode layer, the method comprising the steps of:
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electrically isolating at least one of the substrate contact or the composite contact from its respective associated substrate electrode or composite electrode, selectively generating an electrostatic force between the substrate electrode and the electrode layer of said moveable composite;
moving said moveable composite toward the substrate; and
electrically connecting the substrate contact and composite contact in a circuit electrically isolated from at least one of the substrate electrode or composite electrode.
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Specification