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Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability

  • US 6,230,563 B1
  • Filed: 05/28/1999
  • Issued: 05/15/2001
  • Est. Priority Date: 06/09/1998
  • Status: Expired due to Term
First Claim
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1. A microsensor for measuring angular motion comprising:

  • a substrate having a first surface;

    a first movable mass connected to said substrate;

    a second movable mass connected to said substrate;

    an input axis normal to said first surface of said substrate; and

    a suspension comprising a coupling extending from said first movable mass to said second movable mass, said suspension allowing anti-phase movement by said first and second movable masses along a first axis parallel to said first surface of said substrate while allowing anti-phase movement and resisting in-phase movement by said movable masses along a second axis parallel to said first surface of said substrate, said second axis being substantially orthogonal to said first axis.

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