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Process for fabricating an array of nanowires

  • US 6,231,744 B1
  • Filed: 04/22/1998
  • Issued: 05/15/2001
  • Est. Priority Date: 04/24/1997
  • Status: Expired due to Fees
First Claim
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1. A method for providing a substrate for use in the fabrication of a nanowire array comprising:

  • a) preparing an aluminum substrate;

    b) anodizing the aluminum substrate using an acidic electrolyte solution to provide a porous aluminum oxide film on a surface of said aluminum substrate;

    c) contacting said porous aluminum oxide film with an acid etchant solution for a period of time sufficient to enlarge the cell size of the pores of said aluminum oxide film, said acid selected from the group consisting of H3PO4 and H2C2O4; and

    d) contacting said etched film from step (c) with a solution of H2SO4.

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