Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images

• US 6,232,597 B1
• Filed: 09/11/2000
• Issued: 05/15/2001
• Est. Priority Date: 07/28/1994
• Status: Expired due to Term

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): Lee, John R.
• Application Number:
  US09/659,538
• Time in Patent Office: 246 Days
• Field of Search: 250/234, 250/235, 250/236, 250/306, 250/307, 250/310, 250/311, 356/373, 356/375, 356/376, 382/286, 382/289, 382/291
• US Class Current: 250/234
• CPC Class Codes: G01Q 30/02 Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• CPC Class Codes: G01Q 60/02 Multiple-type SPM, i.e. involving more than one SPM techniques
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G03F 1/84 Inspecting
• CPC Class Codes: G03F 7/704 Scanned exposure beam, e.g. raster-, rotary- and vector scanning mask projection exposure involving relative movement of patterned beam and workpiece during imaging G03F7/70358
• CPC Class Codes: G03F 7/70616 Monitoring the printed patterns
• CPC Class Codes: G11B 5/232 Manufacture of gap
• CPC Class Codes: G11B 5/3116 Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks G11B5/3113, G11B5/245 take precedence
• CPC Class Codes: Y10S 977/85 Scanning probe control process
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property

Abstract

A scanning probe microscope assembly and corresponding method for making confocal, spectrophotometric, near-field, and scanning probe measurements and forming associated images from the measurements.

Claims

1. A computer readable memory for directing a computer that is connected to a display and a pointing device to process first image data representing a first image, the computer readable memory comprising:

an angle measuring tool routine stored thereon and configured to;

generate second image data representing a second image of an angle measuring tool projected on the first image in response to the first image data, the angle measuring tool including endpoint cursors that can be manipulated with the pointing device to position the angle measuring tool on the first image to form an angle,

measure the formed angle; and

generate angle data representing angle information about the measured angle; and

a data formatting routine stored thereon and configured to;

format the second image data for display of the second image on the display; and

format the angle data for display of the angle information on the display.

2. A computer readable memory as claimed in claim 1 wherein the endpoint cursors magnify the first image therearound to enable accurate positioning of the endpoint cursors.

3. A computer readable memory as claimed in claim 1 wherein the angle measuring tool comprises two rulers that each comprise two of the endpoint cursors and are joined at and share one of the endpoint cursors.

4. A computer readable memory as claimed in claim 3 wherein each of the rulers includes an inner region and the angle is formed between the inner regions.

5. A method for processing first image data representing a first image with a computer that is connected to a display and a pointing device, the method comprising the steps of:

generating second image data representing a second image of the first image and an angle measuring tool projected on the first image in response to the first image data, the angle measuring tool including endpoint cursors that can be manipulated with the pointing device to position the angle measuring tool on the first image to form an angle;

measuring the formed angle;

generating angle data representing angle information about the measured angle;

formatting the second image data for display of the second image;

formatting the angle data for display of the angle information; and

displaying the second image on the display in response to the formatted second image data; and

displaying the angle information on the display in response to the formatted angle data.

6. A method as claimed in claim 5 wherein the endpoint cursors magnify the first image therearound to enable accurate positioning of the endpoint cursors.

7. A method as claimed in claim 5 wherein the angle measuring tool comprises two rulers that each comprise two of the endpoint cursors and are joined at and share one of the endpoint cursors.

8. A method as claimed in claim 7 wherein each of the rulers includes an inner region and the angle is formed between the inner regions.