Microstructure defect detection

• US 6,232,787 B1
• Filed: 01/08/1999
• Issued: 05/15/2001
• Est. Priority Date: 01/08/1999
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Schlumberger Technologies Incorporated (Schlumberger NV)
• Inventors: Perez, Pierre, Lo, Chiwoei Wayne
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): Nguyen, Jimmy
• Application Number:
  US09/226,962
• Time in Patent Office: 858 Days
• Field of Search: 324/750, 324/751, 324/752, 250/310, 250/311
• US Class Current: 324/754.22
• CPC Class Codes: H01J 2237/0048 Charging arrangements
• CPC Class Codes: H01J 2237/281 Bottom of trenches or holes
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/268 with scanning beams
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

Methods of inspecting a microstructure comprise: applying charged particles to the wafer to negatively charge up the wafer over a region having contact or via holes, scanning a charged-particle beam over the region while detecting secondary particles so as to produce a detector signal, determining from the detector signal an apparent dimension of a contact hole, and comparing the apparent dimension of the contact hole with reference information to identify a defect. The reference information can be a conventional voltage-contrast image or can be design data indicating expected physical size of the contact hole and expected electrical connectivity of material within or beneath the contact hole. The wafer can be charged up by directing a flood of electrons toward a surface of the wafer and/or by controlling potential of an energy filter so as to direct secondary electrons back to the wafer while directing a charged-particle beam at the wafer. Other methods of inspecting a microstructure comprise charging up a microstructure, interrogating the microstructure with a charged-particle beam to obtain apparent dimensional information for a feature of the microstructure, and comparing the apparent dimensional information with reference information about the microstructure to identify a defect. Apparatus for inspecting semiconductor wafers and other microstructures are also disclosed, as are computer program products comprising a computer usable media having computer-readable program code embodied therein for controlling a charged-particle-beam system for inspecting a microstructure.

Claims

1. A method of inspecting a semiconductor wafer, comprising:

a. applying low energy charged particles of less than 3 keV to the wafer to negatively charge up the wafer over a region having at least two feedthrough holes, a first feedthrough hole having a physical diameter of substantially the same size as that of a second feedthrough hole, the first hole being disposed over a material having an electrical connectivity different from that of the second hole;

b. scanning a charged-particle beam over said negatively charged region while detecting secondary particles to produce a detector signal;

c. determining from the detector signal apparent diameters of the at least two feedthrough holes, the apparent diameter of the first hole differing in size from the physical diameter of the first hole because of a surface potential surrounding the first hole; and

d. comparing the apparent diameters of at least two feedthrough holes with reference information to identify a defect.

2. The method of claim 1, wherein said reference information comprises a voltage-contrast image.

3. The method of claim 1 wherein applying charged particles to the wafer comprises directing a flood of electrons toward a surface of the wafer.

4. The method of claim 1 wherein applying charged particles to the wafer comprises setting potential of an energy filter so as to direct secondary electrons back to the wafer while directing a charged-particle beam at the wafer.

5. The method of claim 1 wherein applying charged particles to the wafer comprises irradiating the wafer with electrons having energy less than about 50 volts.

37. The method of claim 1, wherein applying charged particles to the wafer comprises:

disposing the wafer between two electrodes; and

applying an electric field to the wafer to retain secondary electrons and negatively charge the wafer.

38. The method of claim 37, wherein applying the charged particles is accomplished using a global charge control module.

39. The method of claim 37, wherein applying the charged particles is accomplished using a local charge control module.

40. The method of claim 3, wherein the flood of electrons is directed toward the surface of the wafer using a primary beam.

41. The method of claim 3, wherein the flood of electrons is directed toward the surface of the wafer using a flood gun.

6. A method of inspecting a microstructure, comprising:

a. charging up a microstructure;

b. interrogating the charged microstructure with a charged-particle beam to obtain an apparent dimension for at least one high aspect ratio feature of the microstructure, the apparent dimension differing in size from an actual physical dimension of the high aspect ratio feature as a result of a surface potential surrounding the high aspect ratio feature, the surface potential being affected by an electrical connectivity of a material proximate the high aspect ratio feature; and

c. comparing said apparent dimension with reference information about the microstructure to identify a defect.

7. The method of claim 6 wherein charging up a microstructure comprises applying charged particles to the microstructure to negatively charge up said at least one feature.

8. The method of claim 6 wherein charging up a microstructure comprises applying a flood of electrons to the surface of the microstructure.

9. The method of claim 6 wherein charging up a microstructure comprises setting a potential of an energy filter so as to direct secondary electrons back to the microstructure while interrogating the microstructure with a charged-particle beam.

10. The method of claim 6 wherein charging up a microstructure comprises irradiating the microstructure with electrons having energy less than about 50 volts.

11. The method of claim 6 wherein interrogating the microstructure comprises generating a voltage-contrast image of a surface region of the microstructure from which said apparent dimension can be determined.

12. The method of claim 6 wherein interrogating the microstructure comprises scanning a charged-particle-beam over a surface region of the microstructure while detecting charged particles emanating from the surface region to create a voltage-contrast image of the surface region.

13. The method of claim 6 wherein comparing said apparent dimension with reference information about the microstructure comprises comparing an apparent size of said at least one feature with an expected size.

14. The method of claim 6 wherein comparing said apparent dimension with reference information about the microstructure comprises determining whether the apparent size of said at least one feature is consistent with an expected electrical connectivity of the material within or beneath said at least one feature.

15. The method of claim 6 wherein comparing said apparent dimension with reference information about the microstructure comprises comparing the apparent size of said at least one feature with a size of said feature in a conventional voltage-contrast image.

16. The method of claim 6, further comprising the step of obtaining a conventional voltage-contrast image of the microstructure, wherein interrogating the microstructure comprises generating a feature-enlarged voltage-contrast image of a surface region of the microstructure, and wherein comparing said apparent dimension with reference information about the microstructure comprises comparing an apparent size of said at least one feature in the conventional voltage-contrast image with an apparent size of said at least one feature in the feature-enlarged voltage-contrast image.

19. The method of claim 6, wherein the at least one feature is one of an unfilled contact hole of a semiconductor wafer, and a filled contact hole of a semiconductor wafer.

20. The method of claim 6, wherein the interrogating is performed with a field of view in the range of 0.25 mm to 1.5 mm.

21. The method of claim 6, wherein the charging up the microstructure includes applying a voltage to the microstructure.

42. The method of claim 7, wherein applying charged particles comprises:

disposing the wafer between two electrodes;

applying an electric field to the wafer to retain secondary electrons and negatively charge the wafer.

17. A computer-readable medium containing instructions for controlling a charged-particle-beam system to perform a method for inspecting a semiconductor wafer, the method comprising:

a. applying low energy charged particles of less than 3 keV to the wafer to negatively charge up the wafer over a region having at least two feedthrough holes, a first feedthrough hole having a physical diameter of substantially the same size as that of a second feedthrough hole, the first hole being disposed over a material having an electrical connectivity different from that of the second hole;

b. scanning a charged-particle beam over said negatively charged region while detecting secondary particles to produce a detector signal;

c. determining from the detector signal apparent diameters of the at least two feedthrough holes, the apparent diameter of the first hole differing in size from the physical diameter of the first hole because of a surface potential surrounding the first hole; and

d. comparing the apparent diameters of said at least two feedthrough holes with reference information to identify a defect.

18. A computer program product comprising a computer usable medium having computer-readable program code embodied therein for controlling a charged-particle-beam system comprising:

a. computer-readable program code configured to cause the charged-particle-beam system to charge up a microstructure, the microstructure having at least one high aspect ratio feature;

b. computer-readable program code configured to cause the charged-particle-beam system to interrogate the charged microstructure with a charged-particle beam to obtain an apparent dimension for at least one feature of the microstructure, the apparent dimension differing in size from an actual physical dimension of the feature as a result of a surface potential surrounding the high aspect ratio feature, the surface potential being affected by an electrical connectivity of a material proximate the high aspect ratio feature; and

c. computer-readable program code configured to cause the charged-particle-beam system to compare said apparent dimension with reference information about the microstructure to identify a defect.

22. A method of inspecting a semiconductor wafer, comprising:

a. negatively charging a region of the wafer, the region having a first feedthrough hole and a second feedthrough hole, the first hole having a first physical diameter and being disposed over a first material having a first electrical connectivity, the second hole having a second physical diameter and being disposed over a second material having a second electrical connectivity, the first electrical connectivity differing from the second electrical connectivity, the first and second physical diameters being substantially equal;

b. scanning a charged-particle beam over the negatively-charged region while detecting secondary particles to produce a detector signal; and

c. determining from the detector signal apparent diameters of the first and second holes, the apparent diameter of the first hole differing in size from the apparent diameter of the second hole,

wherein the apparent diameters of the first and second holes are affected by the materials underlying the respective holes, the apparent diameters providing information as to the first and second materials located beneath the respective first and second holes.

23. The method of claim 22, further comprising comparing the apparent diameters of the first and second holes with reference information to identify a defect.

24. The method of claim 22, further comprising optimizing at least one parameter affecting a feature enlargement effect to differentiate between the size of the apparent diameters of the first and second holes.

25. The method of claim 24, wherein optimizing the at least one parameter includes adjusting a voltage to enhance the feature enlargement effect.

26. The method of claim 24, wherein optimizing the at least one parameter includes adjusting a current to enhance the feature enlargement effect.

27. The method of claim 24, wherein optimizing the at least one parameter includes adjusting a charging/imaging area to enhance the feature enlargement effect.

28. The method of claim 24, wherein optimizing the at least one parameter includes adjusting a beam energy to enhance the feature enlargement effect.

29. The method of claim 24, wherein optimizing the at least one parameter includes adjusting an energy filter to enhance the feature enlargement effect.

30. The method of claim 22, wherein negatively charging the wafer includes applying low energy charged particles of less than approximately 50 eV.

31. The method of claim 30, wherein the low energy charged particles are applied using a global charge control module.

32. The method of claim 30, wherein the low energy charged particles are applied using a local charge control module.

33. A method of inspecting a semiconductor wafer, comprising:

a. negatively charging a region of the wafer, the region having a first feedthrough hole and a second feedthrough hole, the first hole having a first physical diameter and being disposed over a first material having a first electrical connectivity, the second hole having a second physical diameter and being disposed over a second material having a second electrical connectivity, the first electrical connectivity being different from the second connectivity, the first and second diameters being substantially equal;

b. scanning a charged-particle beam over the negatively-charged region while detecting secondary particles so as to produce a detector signal;

c. constructing from the detector signal an image of the region of the wafer;

d. determining apparent diameters of the first and second holes;

e. optimizing at least one parameter to enhance a feature enlargement effect to differentiate between the size of the apparent diameters of the first and second holes, the apparent diameters of the first and second holes providing information as to the first and second materials located beneath the respective first and second holes; and

f. comparing the apparent diameters of the first and second holes with reference information to identify a defect.

34. The method of claim 33, wherein optimizing at least one parameter includes adjusting at least one of a voltage, a current, a charging/imaging area, and a beam energy to enhance the feature enlargement effect.

35. The method of claim 33, wherein optimizing at least one parameter includes adjusting an energy filter to enhance the feature enlargement effect.

36. The method of claim 33, wherein negatively charging up the wafer includes applying low energy charged particles of less than approximately 50 eV.