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Three-dimensional measurement apparatus

  • US 6,233,049 B1
  • Filed: 03/22/1999
  • Issued: 05/15/2001
  • Est. Priority Date: 03/25/1998
  • Status: Expired due to Term
First Claim
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1. A three-dimensional measurement apparatus comprising:

  • an irradiation unit that irradiates and scans a measurement target with a reference beam;

    a photosensor for receiving light reflected from a measurement target irradiated with said reference beam;

    a reading unit that repeatedly reads out signals from said photosensor during the scanning of said reference beam;

    an operation mode selector; and

    a controller that switches the scanning speed of said reference beam and a readout operation of said photosensor in accordance with said selected operation mode.

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