Process control system and method for transferring process data therefor
First Claim
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1. A process control system comprising:
- a plurality of first controllers for individually controlling a plurality of process chambers; and
a second controller for controlling said plurality of first controllers, and wherein each of said plurality of first controllers includes first transferring means for transferring process data detected by a corresponding process chamber to said second controller, and said second controller includes accumulating means for accumulating process data transferred from said plurality of first controllers to obtain accumulated process data therein, second transferring means for transferring the accumulated process data to an outside, measuring means for measuring a control load quantitatively in real time, and transfer control means for causing the second transferring means to externally transfer the accumulated process data when the control load measured by the measuring means has a value which is not more than a set value.
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Abstract
A process control system includes a plurality of machine controllers for individually controlling a plurality of process chambers and a main controller for controlling the machine controllers. Each of the machine controllers has a function of transferring process data detected by its corresponding process chamber to the main controller. The main controller has a storage device for accumulating process data transferred from the machine controllers and a function of transferring the accumulated process data to a host computer when the main controller is in a predetermined control load state.
40 Citations
17 Claims
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1. A process control system comprising:
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a plurality of first controllers for individually controlling a plurality of process chambers; and
a second controller for controlling said plurality of first controllers, and wherein each of said plurality of first controllers includes first transferring means for transferring process data detected by a corresponding process chamber to said second controller, and said second controller includes accumulating means for accumulating process data transferred from said plurality of first controllers to obtain accumulated process data therein, second transferring means for transferring the accumulated process data to an outside, measuring means for measuring a control load quantitatively in real time, and transfer control means for causing the second transferring means to externally transfer the accumulated process data when the control load measured by the measuring means has a value which is not more than a set value. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A process control system comprising:
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a plurality of first controllers for individually controlling a plurality of process chambers; and
a second controller for controlling said plurality of first controllers, and wherein each of said plurality of first controllers includes means for transferring process data detected by a corresponding one of said process chambers to said second controller, and said second controller includes means for accumulating process data transferred from said plurality of first controllers to obtain accumulated process data, means for measuring a control load imposed on said second controller to obtain measured control load, and means for transferring the accumulated process data to an outside when the measured control load corresponds to at least one of a time period immediately after a series of process for all wafers in one cassette has been completed, a standby state until a cassette carry-in request is made, and a time when said system is interrupted due to an operation error. - View Dependent Claims (8)
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9. A process control system comprising:
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a plurality of first controllers for individually controlling a plurality of process chambers; and
a second controller for controlling said plurality of first controllers, and wherein each of said plurality of first controllers includes means for transferring process data detected by a corresponding one of said process chambers to said second controller, and said second controller includes means for accumulating process data transferred from said plurality of first controllers to obtain accumulated process data, setting means for setting an arbitrary timing at which the accumulated process data is transferred to an outside, the arbitrary timing corresponding to least one of a time period immediately after a series of processes for all wafers in one cassette has been completed, a standby state until a cassette carry-in request is made, and a time when said system is interrupted due to an operation error, and means for transferring the accumulated process data to the outside in accordance with the set timing. - View Dependent Claims (10)
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11. A method of transferring process data, comprising the steps of:
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individually controlling a plurality of process chambers by a plurality of first controllers;
controlling said plurality of first controllers by a second controller;
transferring process data detected by said plurality of process chambers to said second controller;
accumulating the transferred process data in storage means; and
transferring the accumulated process data to an outside when a control load detected by said second controller is not more than a predetermined value. - View Dependent Claims (12, 13)
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14. A method of transferring process data, comprising the steps of:
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individually controlling a plurality of process chambers by a plurality of first controllers;
controlling said plurality of first controllers by a second controller;
transferring process data detected by said plurality of process chambers to said second controller;
accumulating the transferred process data to obtain accumulated process data;
measuring a control load imposed to said second controller to obtain a measured control load; and
transferring the accumulated process data to an outside when the measured control load corresponds to at least one of a time period immediately after a series of processes for all wafers in one cassette has been completed, a standby state until a cassette carry-in request is made, and a time when said system is interrupted due to an operation error.
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15. A process control system comprising:
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a plurality of first controllers configured to individually control a plurality of process chambers; and
a second controller configured to control said plurality of first controllers, and wherein each of said plurality of first controllers includes a first transferring unit configured to transfer process data detected by a corresponding one of said process chambers to said second controller, and said second controller includes an accumulating unit configured to accumulate process data transferred from said plurality of first controllers to obtain accumulated process data therein, a second transferring unit configured to transfer the accumulated process data to an outside, a measuring unit configured to measure a control load quantitatively in real time, and a transfer control unit configured to cause said second transferring unit to externally transfer the accumulated process data when the control load measured by the measuring means has a value which is not more than a set value.
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16. A process control system comprising:
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a plurality of first controllers configured to individually control a plurality of process chambers; and
a second controller configured to control said plurality of first controllers, and wherein each of said plurality of first controllers includes a first transferring unit configured to transfer process data detected by a corresponding one of said process chambers to said second controller, and said second controller includes an accumulating unit configured to accumulate process data transferred from said plurality of first controllers to obtain accumulated process data, a measuring unit configured to measure a control load imposed to said second controller to obtain a measured control load, and a second transferring unit configured to transfer the accumulated process data to an outside when the measured control load corresponds to at least one of a time period immediately after a series of processes for all wafers in one cassette has been completed, a standby state until a cassette carry-in request is made, and a time when said system is interrupted due to an operation error.
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17. A process control system comprising:
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a plurality of first controllers configured to individually control a plurality of process chambers; and
a second controller configured to control said plurality of first controllers, and wherein each of said plurality of first controllers includes a first transferring unit configured to transfer process data detected by a corresponding one of said process chambers to said second controller, and said second controller includes an accumulating unit configured to accumulate process data transferred from said plurality of first controllers to obtain accumulated process data, a setting unit configured to set an arbitrary timing in which the accumulated process data is transferred to an outside, the arbitrary timing corresponding to at least one of a time period immediately after a series of processes for all wafers in one cassette has been completed, a standby state until a cassette carry-in request is made, and a time when said system is interrupted due to an operation error, and a second transferring unit configured to transfer the accumulated process data to the outside in accordance with the set timing.
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Specification