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Method of manufacture of an image creation apparatus

  • US 6,235,211 B1
  • Filed: 07/10/1998
  • Issued: 05/22/2001
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A method of manufacture of an ink jet printer which includes a trough having side walls and an exposed roof, said trough being substantially filled with fluid during operations;

  • a paddle vane located within the trough and offset from one wall when said paddle vane is in a quiescent position;

    an actuation mechanism attached to said paddle vane such that, upon activation of said actuation mechanism, said paddle vane is caused to move towards said one wall, resulting in an increase in pressure in the fluid between said one wall and said paddle vane, resulting in a consequential ejection of fluid via said exposed roof, said method comprising the steps of;

    (a) initially providing a silicon wafer having a circuitry wafer layer including electrical circuitry necessary for the operation of the actuation mechanism on demand;

    (b) etching said trough in the surface of said wafer;

    (c) creating said actuation mechanism and said paddle vane on said silicon wafer by means of depositing and etching a series of sacrificial layers to form a supporting structure for said actuation mechanism and said paddle vane, in addition to depositing and suitably etching a series of materials for forming said actuation mechanism and said paddle vane;

    (d) etching an ink supply channel interconnecting said trough through said wafer with an ink supply reservoir; and

    (e) etching away any remaining sacrificial layers so as to release said actuation mechanism and said paddle vane for operation.

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