Structure of a three-electrode capacitive pressure sensor
First Claim
1. A structure of three-electrode capacitive pressure sensor, comprising dual electrode plates, that one of which is divided into a ring-shaped three electrode structure with its outer and middle layers electrodes wrapped separately at outward surrounding of inner layer electrode, and that the other one uses another electrode plate to form a dual capacitors through series-wound capacitor.
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Abstract
A structure and producing method of a three-electrode capacitive pressure sensor can integrate and produce sensor capacitor and reference capacitor in the same pressure sensor cavity. This dual capacitor integration structure can cancel off environment interference of the same mode by differentiated circuit. Avoiding connection between upper and lower electrode plates can be achieved through the existence of a third electrode plate. In working pressure interval from 25 psi to 40 psi, the sensitivity of said three-electrode capacitive sensor is a 0.21 pF/psi, while the sensitivity of an ordinary planar connection pressure sensor is 0.05 pF/psi. The merits of said three-electrode capacitive pressure sensor include trivial production procedure and connection with planar and high sensitivity.
61 Citations
2 Claims
- 1. A structure of three-electrode capacitive pressure sensor, comprising dual electrode plates, that one of which is divided into a ring-shaped three electrode structure with its outer and middle layers electrodes wrapped separately at outward surrounding of inner layer electrode, and that the other one uses another electrode plate to form a dual capacitors through series-wound capacitor.
Specification
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- Resources
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Current AssigneeNational Science Foundation (Government of the United States of America)
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Original AssigneeNational Science Foundation (Government of the United States of America)
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InventorsHsieh, Yeou-Lang, Hwang, Gwo-Jen, Chang, Kow-Ming
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Primary Examiner(s)Nelms, David
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Assistant Examiner(s)LE, DUNG ANH
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Application NumberUS09/660,357Time in Patent Office252 DaysField of Search257/414, 257/415, 257/416, 257/417, 257/418, 257/419, 257/300-306, 438/50, 438/51, 438/52, 438/53US Class Current257/419CPC Class CodesG01L 9/0073 using a semiconductive diap...
