Q-controlled microresonators and tunable electronic filters using such resonators

• US 6,236,281 B1
• Filed: 09/21/1999
• Issued: 05/22/2001
• Est. Priority Date: 12/11/1992
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Nguyen, Clark Tu-Cuong, Howe, Roger T.
• Primary Examiner(s): MIS, DAVID C
• Application Number:
  US09/401,337
• Time in Patent Office: 609 Days
• Field of Search: 331/116.R, 331/116.FE, 331/116.M, 331/154-156, 331/177.R, 331/177.V, 333/186, 333/197, 333/219, 361/278, 361/296
• US Class Current: 331/154
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B
• CPC Class Codes: H01G 5/14 due to longitudinal movement of electrodes
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/0023 Balance-unbalance or balance-balance networks
• CPC Class Codes: H03H 9/02377 Symmetric folded-flexure
• CPC Class Codes: H03H 9/02393 Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
• CPC Class Codes: H03H 9/02425 by electrostatically pulling the beam
• CPC Class Codes: H03H 9/467 Post-fabrication trimming of parameters, e.g. center frequency

Abstract

A Q-controlled microresonator and devices including such resonators.

Claims

1. A voltage-tunable microresonator system, comprising:

a microresonator micromachined on a substrate, said microresonator having a nonlinear voltage-to-force transfer function; and

means for biasing said microresonator with a variable bias voltage.

2. The microresonator system of claim 1, wherein said microresonator includes sloped drive fingers.

3. A tunable microresonator, comprising:

a substrate;

a substantially rigid member; and

a flexible member connecting said substantially rigid member to said substrate, said flexible member having a variable equilibrium tension.

4. The tunable microresonator of claim 3, wherein said variable equilibrium tension is varied by pulling said flexible member.

5. The tunable microresonator of claim 4, wherein said flexible member is pulled electrostatically.

6. A tunable microelectromechanical resonator comprising:

a substrate;

at least one fixed electrode anchored to said substrate and said electrode comprising a polylayer suspended above said substrate and a ground plane covering said substrate;

a movable plate having a portion thereof disposed between said polylayer and said substrate; and

a flexible member connecting said plate to said substrate.

7. A method for applying a weighted sum of a plurality of signals as a force to a micromachined member, comprising:

providing a comb structure having fingers patterned on said member;

providing one electrode for each signal, each said electrode comprising combs with a plurality of fingers interdigitated with the fingers of said member, the number of fingers of each comb being proportional to the weight of the signal; and

applying said signals between said electrodes and said member.