Chemical sensor and coating for same

• US 6,237,397 B1
• Filed: 10/06/1999
• Issued: 05/29/2001
• Est. Priority Date: 10/06/1999
• Status: Expired due to Fees

• Current Assignee: Iowa State University Research Foundation Incorporated (Iowa State University)
• Original Assignee: Iowa State University Research Foundation Incorporated (Iowa State University)
• Inventors: Porter, Marc D., Shinar, Ruth, Liu, Guojun
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): CYGAN, MICHAEL T
• Application Number:
  US09/413,628
• Time in Patent Office: 601 Days
• Field of Search: 73/23.2, 73/24.06, 73/31.01, 73/31.02, 73/31.03, 73/31.05, 310/313 R
• US Class Current: 73/24.06
• CPC Class Codes: G01N 2291/014 Resonance or resonant frequency
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/02863 Electric or magnetic parameters
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 2291/0426 Bulk waves, e.g. quartz crystal microbalance, torsional waves
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B

Abstract

An acoustic wave based-chemical sensor containing a crystal substrate and a coating of small particulate matter is disclosed. The small particulate matter can be graphite particles. Transducers are connected to the crystal substrate to generate an alternating potential across the crystal substrate, which in turn causes the crystal to resonate due to the converse piezoelectric effect. The coating absorbs the analyte, thus changing the mass of the sensor, and accordingly changing its resonant frequency. The transducers detect this change in resonant frequency to indicate that the analyte is present. The use of small particulate matter results in a coating having a large surface area which facilitates mass uptake of large amounts of VOCs, improved acoustic properties even with relatively thick coatings, and a high operational temperature range.

Claims

1. An acoustic wave-based chemical sensor, comprising:

a substrate;

at least two electrodes connected to the substrate; and

a coating positioned over the substrate and at least one of the electrodes, the coating consisting of graphite microparticles.

2. The chemical sensor of claim 1 wherein the graphite microparticles comprises particles having a diameter of about 0.01 to about 2 microns.

3. The chemical sensor of claim 1 wherein the graphite microparticles comprises particles having a diameter of about 0.03 to about 1 micron.

4. The chemical sensor of claim 1 wherein the coating has a thickness of about 0.3 to about 12 microns.

5. The chemical sensor of claim 1 wherein the coating has a thickness of about 0.5 to about 9 microns.

6. The chemical sensor of claim 1 wherein the substrate is selected from the group consisting of quartz crystal, lithium niobate, and aluminum nitrite.

7. The chemical sensor of claim 1 wherein the substrate comprises quartz crystal.

8. The chemical sensor of claim 1 further comprising a a chemically screening overlayer positioned over the coating of graphite microparticles.

9. The chemical sensor of claim 1 wherein the sensor has an operating temperature range of about −

10°

C. to about 100°

C.

10. The chemical sensor of claim 1 wherein the sensor has a response time of about one minute to about nine minutes.

11. The chemical sensor of claim 1 wherein the coating has an open surface morphology.

12. A coating for an acoustic wave based-chemical sensor, the coating consisting of graphite microparticles.

13. The coating of claim 12 wherein the graphite microparticles comprises particles having a diameter of about 0.01 to about 2 microns.

14. The coating of claim 12 wherein the graphite microparticles comprises particles having a diameter of about 0.03 to about 1 micron.

15. The coating of claim 12 wherein the coating has a thickness of about 0.3 to about 12 microns.

16. The coating of claim 12 wherein the coating has a thickness of about 0.5 to about 9 microns.

17. The coating of claim 12 wherein the sensor has an operating temperature range of about −

10°

C. to about 100°

C.

18. The coating of claim 12 wherein the sensor has a response time of about 1 minute to about 9 minutes.

19. A method of detecting volatile organic compounds using an acoustic wave-based chemical sensor comprising:

a substrate;

at least two electrodes connected to the substrate; and

a coating positioned over the substrate and at least one of the electrodes, the coating consisting of graphite microparticles.

20. The method of claim 19 wherein the graphite microparticles comprises particles having a diameter of about 0.01 to about 2 microns.

21. The method of claim 19 wherein the graphite microparticles comprises particles having a diameter of about 0.03 to about 1 micron.

22. The method of claim 19 wherein the coating has a thickness of about 0.3 to about 12 microns.

23. The method of claim 19 wherein the coating has a thickness of about 0.5 to about 9 microns.

24. The method of claim 19 wherein the sensor further comprises a chemically screening overlayer positioned over the coating of graphite microparticles.

25. The method of claim 19 wherein the sensor has an operating temperature range of about −

10°

C. to about 100°

C.

26. The method of claim 19 wherein the sensor has a response time of about one minute to about nine minutes.