Reactive ion beam etching method and a thin film head fabricated using the method
First Claim
1. A process for fabricating a thin film magnetic head, comprising the steps of:
- forming a structure comprising a lower magnetic pole layer, a gap layer overlying the lower magnetic pole layer, and an patterned upper magnetic pole layer over the gap layer;
bombarding said structure with a first ion beam extracted from a first ion source, the first ion beam operative in etching the gap layer and including a species that is capable of forming a carbonaceous deposit on at least a portion of said structure; and
bombarding said structure with a second ion beam that includes an oxidizing species to substantially remove the carbonaceous deposit that may have been formed from the first ion beam being directed at said structure.
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Accused Products
Abstract
A reactive ion beam etching method which employs an oxidizing agent in a plasma contained in an ion source to control carbonaceous deposit (e.g., polymer) formation within the ion source and on the substrate. During operation of an ion source, after operating the ion source with a plasma having a carbonaceous deposit forming species, a plasma containing an oxidizing agent (species) is generated within the ion source. Preferably, within the ion source a plasma is maintained essentially continuously between the time that the carbonaceous deposit forming species is present and the time that the oxidizing agent is present. A reactive ion beam extracted from an ion source containing a plasma having an oxidizing species may be impinged onto a sample substrate to remove (i.e., etch) any carbonaceous material deposits (e.g., polymers) formed on the sample, such as may be formed from previous reactive ion beam etching (RIBE) processing steps using an ion beam having species which may form carbonaceous (e.g., polymer) deposits on the sample substrate structure. Preferably, a reactive ion beam containing an oxidizing species is incident upon the sample at an angle which enhances the selectivity of the carbonaceous deposit (e.g., polymer) etching relative to other materials upon which the ion beam impinges. A thin film magnetic head is fabricated according to a pole trimming process which employs RIBE with an oxidizing species to remove any carbonaceous material (e.g., polymer) deposits formed during a previous fluorocarbon based RIBE step.
343 Citations
89 Claims
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1. A process for fabricating a thin film magnetic head, comprising the steps of:
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forming a structure comprising a lower magnetic pole layer, a gap layer overlying the lower magnetic pole layer, and an patterned upper magnetic pole layer over the gap layer;
bombarding said structure with a first ion beam extracted from a first ion source, the first ion beam operative in etching the gap layer and including a species that is capable of forming a carbonaceous deposit on at least a portion of said structure; and
bombarding said structure with a second ion beam that includes an oxidizing species to substantially remove the carbonaceous deposit that may have been formed from the first ion beam being directed at said structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 71, 72)
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36. An ion beam etching method, comprising the steps of:
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bombarding a sample with a first ion beam extracted from an ion source that has a first plasma comprising a carbonaceous deposit forming species; and
introducing, after said first ion beam etching step has been initiated, an oxygen containing gas into an extant plasma of the ion source to provide a third plasma in said ion source, said third plasma having oxidizing species derived from said oxygen containing gas, and wherein said ion source contains a plasma continuously in time between said first plasma and said extant plasma. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52)
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53. A process for ion beam etching of a substrate having a structure comprising a first layer and a second layer, said process comprising the steps of:
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generating in an ion source a plasma including a species capable of forming carbonaceous deposits in said ion source;
impinging an ion beam extracted from said plasma onto said substrate to selectively etch said second layer at a rate greater than about two times the rate of etching said first layer, said ion beam having species that chemically react with a material included in said second layer; and
wherein said selectivity is substantially repeatable upon independent executions of said process. - View Dependent Claims (54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66)
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67. A process for fabricating a thin film magnetic head, comprising the steps of:
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forming a structure comprising a lower magnetic pole layer, a gap layer overlying the lower magnetic pole layer, and a patterned upper magnetic pole layer over the gap layer;
bombarding said structure with a first ion beam extracted from a first ion source, the first ion beam operative in etching the gap layer to expose a portion thereof; and
bombarding said structure, including the portion of the gap layer exposed by etching the gap layer, with a second ion beam that includes an oxidizing species. - View Dependent Claims (68, 69, 70, 73, 74, 75)
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76. An ion beam etching method, comprising the steps of:
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bombarding a sample with a first ion beam extracted from an ion source that has a first plasma comprising a carbonaceous species; and
introducing, after said first ion beam etching step has been initiated, an oxygen containing gas into an extant plasma of the ion source to provide a third plasma in said ion source, said third plasma having oxidizing species derived from said oxygen containing gas, and wherein said ion source contains a plasma continuously in time between said first plasma and said extant plasma. - View Dependent Claims (77, 78, 79, 80, 81, 82, 83, 84)
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85. A process for ion beam etching of a substrate having a structure comprising a first layer and a second layer, said process comprising the steps of:
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generating in an ion source a plasma that includes a carbon-containing species;
impinging an ion beam extracted from said plasma onto said substrate to selectively etch said second layer at a rate greater than about two times the rate of etching said first layer, said ion beam having species that chemically react with a material included in said second layer; and
wherein said selectivity is substantially repeatable upon independent executions of said process. - View Dependent Claims (86, 87, 88, 89)
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Specification