×

Method for manufacturing an ink-jet head having nozzle openings with a constant width

  • US 6,238,585 B1
  • Filed: 08/10/1999
  • Issued: 05/29/2001
  • Est. Priority Date: 07/03/1995
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of manufacturing an ink-jet head comprising the steps of:

  • forming an etch resist film on first and second sides of a silicon monocrystalline substrate having a face (110);

    etching part of the etch resist film on said first side of said substrate to expose a first area of the silicon monocrystalline substrate so as to form cylindrical portions having sufficient diameter to discharge ink droplets;

    etching a second exposed area on the second side of said substrate anisotropically to form a nozzle plate having a plurality of nozzle openings so as to have faces (1-11) and (-11-1) in the direction in which the nozzle openings are arrayed, wherein said nozzle openings are formed after the cylindrical portions are formed; and

    laminating a spacer having a plurality of ink reservoirs, ink supply ports and ink cavities on the side of the second exposed area.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×