Method for depositing titanium oxide coatings on flat glass
First Claim
1. A chemical vapor deposition process for depositing a titanium oxide coating on a glass substrate at deposition rates of at least 130 Å
- /sec, comprising;
(a) pre-mixing a uniform, precursor gas mixture containing titanium tetrachloride and an ester, said ester having an alkyl group with a β
hydrogen;
(b) delivering said precursor gas mixture at a temperature below the thermal decomposition temperature of said ester to a location near a glass substrate to be coated, said substrate being at a temperature above the thermal decomposition temperature of said ester; and
c) introducing said precursor gas mixture into a vapor space above said glass substrate wherein said ester thermally decomposes and thereby initiates a reaction with said titanium tetrachloride to produce a titanium oxide coating on said glass substrate.
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Abstract
A chemical vapor deposition process for laying down a tin or titanium oxide coating on a glass substrate through the use of an organic oxygen-containing compound and the corresponding metal tetrachloride. The organic oxygen compound is preferably an ester having an alkyl group with a β hydrogen in order to obtain a high deposition rate. The resulting article has a tin or titanium oxide coating which can be of substantial thickness because of the high deposition rates attainable with the novel process, and, in the case of titanium oxide coating possesses a desirable refractive index greater than 2.4. The coating growth rates resulting from the method of the present invention may be at least 130 Å per second.
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Citations
23 Claims
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1. A chemical vapor deposition process for depositing a titanium oxide coating on a glass substrate at deposition rates of at least 130 Å
- /sec, comprising;
(a) pre-mixing a uniform, precursor gas mixture containing titanium tetrachloride and an ester, said ester having an alkyl group with a β
hydrogen;
(b) delivering said precursor gas mixture at a temperature below the thermal decomposition temperature of said ester to a location near a glass substrate to be coated, said substrate being at a temperature above the thermal decomposition temperature of said ester; and
c) introducing said precursor gas mixture into a vapor space above said glass substrate wherein said ester thermally decomposes and thereby initiates a reaction with said titanium tetrachloride to produce a titanium oxide coating on said glass substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- /sec, comprising;
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14. A chemical vapor deposition process for depositing a titanium oxide coating on a float glass ribbon at deposition rates of at least 130 Å
- /sec comprising;
(a) pre-mixing a uniform, precursor gas mixture containing titanium tetrachloride and an ester, said ester having an alkyl group with a β
hydrogen;
(b) delivering said precursor gas mixture at a temperature below the thermal decomposition temperature of said ester to a location near a float glass ribbon to be coated, said float glass ribbon being at a temperature range above the thermal decomposition temperature of said ester; and
(c) introducing said precursor gas mixture into a vapor space above said float glass ribbon wherein said ester thermally decomposes and thereby initiates a reaction with said titanium tetrachloride to produce a titanium oxide coating on said float glass ribbon.
- /sec comprising;
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15. A chemical vapor deposition process for depositing a titanium oxide coating on a substrate at a conversion efficiency such that, depending on the desired coating thickness, deposition rates of at least 130 Å
- /sec can be attained, comprising;
(a) pre-mixing a uniform, precursor gas mixture containing titanium tetrachloride and an ester, said ester having an alkyl group with a β
hydrogen;
(b) delivering said precursor gas mixture at a temperature below the thermal decomposition temperature of said ester to a location near a substrate to be coated, said substrate being at a temperature above the thermal decomposition temperature of said ester; and
(c) introducing said precursor gas mixture into a vapor space above said substrate wherein said ester thermally decomposes and thereby initiates a reaction with said titanium tetrachloride to produce a titanium oxide coating on said substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
- /sec can be attained, comprising;
Specification