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Piezoelectric/electrostrictive device

  • US 6,239,534 B1
  • Filed: 12/28/1998
  • Issued: 05/29/2001
  • Est. Priority Date: 09/08/1997
  • Status: Expired due to Fees
First Claim
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1. A piezoelectric/electrostrictive device comprising:

  • a substrate having two pairs of concave recesses formed therein, the bottom of each recess defining a diaphragm extending in a first longitudinal direction;

    a connection plate having a first end secured between two of said diaphragms and an opposed second end secured between the other two diaphragms, said connection plate extending in a direction substantially perpendicular to said first longitudinal direction and being spanned between and connected to the bottoms of said pairs of concave recesses;

    piezoelectric/electrostrictive elements arranged on at least a part of a planar surface of each diaphragm; and

    a fixing plate connected to the connection plate and extending in a longitudinal direction substantially parallel to said first longitudinal direction.

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