Parylene micro check valve and fabrication method thereof
First Claim
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1. A valve assembly comprising:
- a substrate, having a top surface and a bottom surface, and formed of a material that can be processed using semiconductor processing techniques, forming a valve seat including an orifice dimensioned to direct flow of fluid out from said top surface; and
a deflectable membrane formed on the top surface of the substrate and including a membrane cap anchored by a plurality of twist-up tethers, the membrane cap being vertically displaceable from the top surface in response to fluid flow through the orifice.
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Abstract
The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.
112 Citations
17 Claims
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1. A valve assembly comprising:
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a substrate, having a top surface and a bottom surface, and formed of a material that can be processed using semiconductor processing techniques, forming a valve seat including an orifice dimensioned to direct flow of fluid out from said top surface; and
a deflectable membrane formed on the top surface of the substrate and including a membrane cap anchored by a plurality of twist-up tethers, the membrane cap being vertically displaceable from the top surface in response to fluid flow through the orifice. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. The valve assembly, comprising:
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a substrate, formed of silicon, and having an opening, and having a roughened portion around said opening, which is roughened relative to polished silicon; and
a deflectable membrane, formed of a material with a low Young'"'"'s modulus, and attached to said top surface of said substrate, including a first portion which can close said opening, and a plurality of twist up holding portions, which are twisted when extended relative to when they are not extended, having a first portion which is aligned to said opening. - View Dependent Claims (16, 17)
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Specification