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Parylene micro check valve and fabrication method thereof

  • US 6,240,962 B1
  • Filed: 11/16/1999
  • Issued: 06/05/2001
  • Est. Priority Date: 11/16/1998
  • Status: Expired due to Term
First Claim
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1. A valve assembly comprising:

  • a substrate, having a top surface and a bottom surface, and formed of a material that can be processed using semiconductor processing techniques, forming a valve seat including an orifice dimensioned to direct flow of fluid out from said top surface; and

    a deflectable membrane formed on the top surface of the substrate and including a membrane cap anchored by a plurality of twist-up tethers, the membrane cap being vertically displaceable from the top surface in response to fluid flow through the orifice.

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