Carrier head with pressurizable bladder

• US 6,241,593 B1
• Filed: 07/09/1999
• Issued: 06/05/2001
• Est. Priority Date: 07/09/1999
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bose, Frank, Zuniga, Steven M., Chen, Hung Chih
• Primary Examiner(s): BANKS, DERRIS HOLT
• Application Number:
  US09/350,950
• Time in Patent Office: 697 Days
• Field of Search: 451/8, 451/289, 451/398, 451/9, 451/285, 451/286, 451/287, 451/288, 451/290, 451/385, 451/397, 451/388, 279/3, 340/680
• US Class Current: 451/288
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces

Abstract

Configurations within the CMP carrier head to maintain a constant contact area through which a downward pressure can be applied and distributed to the substrate for ensuring the force pressing the substrate against the pad will remain steady for each application of pressure, and for repeated application of pressure over time.

Claims

1. A carrier head, comprising:

a base;

a flexible membrane extending beneath the base to form a pressurizable chamber, a lower surface of the flexible membrane providing a mounting surface on which a substrate can be positioned;

a support structure positioned in the chamber, a lower surface of the support structure movable to contact an upper surface of the flexible membrane; and

a pressurizable bladder formed between the base and the flexible membrane to control a downward pressure on the support structure, wherein at least one of the bladder and support structure is configured to provide a substantially constant contact area between the support structure and the bladder as a vertical position of the support structure relative to the base changes.

2. The carrier head of claim 1 wherein the support structure is configured to provide a substantially constant contact area between the support structure and the bladder.

3. The carrier head of claim 2, wherein the support structure includes an upwardly extending projection having a top surface that contacts a bottom surface of the bladder.

4. The carrier head of claim 3, wherein the top surface of the projection is sufficiently smaller than the bottom surface of the bladder that the bladder remains in contact with the entire top surface as the support structure moves vertically.

5. The carrier head of claim 4, wherein the bladder extends over the projection to form a convolution.

6. The carrier head of claim 1, wherein the bladder is configured to provide a substantially constant contact area between the support structure and the bladder.

7. The carrier head of claim 6, wherein the bladder includes a thick section that undergoes substantially no deformation as the bladder is inflated to contact the support structure.

8. The carrier head of claim 7, wherein the bladder further includes two sidewalls connected to the base.

9. The carrier head of claim 8, wherein the two sidewalls include a convoluted portion.

10. The carrier head of claim 7, wherein grooves are formed in at least one of a bottom surface of the thick section and a top surface the support structure to provide fluid communication through the pressurizable chamber.

11. The carrier head of claim 7, wherein the thick portion includes an indentation and the support structure includes a projection that fits into the indentation.

12. The carrier head of claim 11, wherein the indentation and projection are annular.

13. The carrier head of claim 6, wherein the bladder includes pleats forming the sides of the bladder.

14. The carrier head of claim 13, wherein a bottom surface of the bladder includes a rigid ring to provide a constant contact area with the support structure.

15. The carrier head of claim 1, wherein the bladder is joined to the flexible membrane.

16. The carrier head of claim 1, wherein a second flexible membrane extends below the base to form the pressurizable bladder.

17. A carrier head for a chemical mechanical polishing apparatus, comprising:

a base;

a first pressurizable chamber located below the base, the first pressurizable chamber having a first chamber wall formed of a flexible membrane with a lower surface that provides a mounting surface for a substrate;

a support structure located in the first pressurizable chamber to contact an upper surface of the flexible membrane; and

a second pressurizable chamber to apply a downward pressure to the support structure, the second pressurizable chamber having a second chamber wall configured to contact the support structure over a constant contact area as a vertical position of the support structure relative to the base changes.

18. The carrier head of claim 17, wherein a top surface of the support structure is sufficiently smaller than a bottom surface of the second chamber wall that the second chamber wall remains in contact with the entire top surface as the support structure moves vertically.

19. The carrier head of claim 17, wherein a lower surface of the second chamber wall includes a thick section to contact the support structure that undergoes substantially no deformation as the second chamber is pressurized.

20. The carrier head of claim 17, wherein the second chamber has pleated sidewalls.

21. The carrier head of claim 20, wherein the second chamber wall is formed of a rigid ring.

22. The carrier head of claim 17, wherein the first chamber wall and the second chamber wall are portions of a single flexible membrane.

23. A carrier head for a chemical mechanical polishing apparatus, comprising:

a base;

a retaining ring coupled to the base;

a flexible membrane extending beneath the base to form a pressurizable chamber, a lower surface of the flexible membrane providing a mounting surface on which a substrate can be positioned;

a support structure positioned in the chamber, a lower surface of the support structure movable to contact an upper surface of the flexible membrane; and

means for applying a substantially constant downward pressure to an upper surface of the support structure as the retaining ring wears and a vertical position of the support structure relative to the base changes.

24. The carrier head of claim 23, wherein the means includes a convoluted membrane to provide a high flexibility.

25. The carrier head of claim 23, wherein the means for applying a substantially constant downward pressure includes a bladder with a means for providing a substantially constant contact area with the upper surface of the support structure.

26. The carrier head of claim 25, wherein the means for providing a substantially constant contact area includes a thick section of the bladder that undergoes substantially no deformation as the bladder is pressurized.

27. The carrier head of claim 25, wherein the means for providing a substantially constant contact area includes a rigid section of the bladder that undergoes substantially no deformation as the bladder is pressurized.