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Method of manufacture of a buckle strip grill oscillating pressure ink jet printer

  • US 6,241,906 B1
  • Filed: 07/10/1998
  • Issued: 06/05/2001
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Fees
First Claim
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1. A method of manufacturing an ink jet printhead, the method comprising the steps of:

  • (a) providing an initial semiconductor wafer having an electrical circuitry layer formed thereon;

    (b) etching at least one ink inlet channel in the electrical circuitry layer;

    (c) depositing a first sacrificial material layer over the electrical circuitry layer to fill the, or each, ink inlet channel and etching an actuator anchor area in the first sacrificial material layer;

    (d) depositing a first expansion material layer of a material having a suitable coefficient of thermal expansion and etching predetermined vias in the first expansion material layer;

    (e) depositing a conductive layer on the first expansion material layer, and etching the conductive layer to be conductively interconnected to the electrical circuitry layer via said vias;

    (f) depositing a second expansion material layer of a material having a suitable coefficient of thermal expansion, and etching a shutter element over the at least one ink inlet channel, so that the shutter element is defined by a combination of the first and second expansion material layers and the conductive layer, the shutter element being anchored by the vias;

    (g) depositing a second sacrificial material layer, and etching the second sacrificial layer to form a nozzle chamber mould;

    (h) depositing an inert material layer over the sacrificial material layer and etching the inert material layer to form a nozzle chamber around the shutter element and a nozzle ejection port in the inert material layer;

    (i) etching an ink supply channel through the wafer; and

    (j) etching away the sacrificial layers.

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