Electronic display device having an active matrix display panel

• US 6,243,155 B1
• Filed: 10/19/1998
• Issued: 06/05/2001
• Est. Priority Date: 10/20/1997
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kuwabara, Hideaki, Sakakura, Masayuki, Zhang, Hongyong
• Primary Examiner(s): Sikes, William L.
• Assistant Examiner(s): CHOWDHURY, TARIFUR RASHID
• Application Number:
  US09/174,468
• Time in Patent Office: 960 Days
• Field of Search: 250/281.1, 349/199, 257/57, 257/59, 372/50
• US Class Current: 349/199
• CPC Class Codes: G02F 1/13312 Circuits comprising photodetectors for purposes other than feedback
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: G02F 1/135 Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied G02F1/133348 takes precedence
• CPC Class Codes: G02F 1/136227 Through-hole connection of the pixel electrode to the active element through an insulation layer
• CPC Class Codes: G02F 1/13624 having more than one switching element per pixel
• CPC Class Codes: G02F 1/136286 Wiring, e.g. gate line, drain line
• CPC Class Codes: G02F 1/13629 Multilayer wirings
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/14665 Imagers using a photoconductor layer
• CPC Class Codes: H04M 1/0264 for a camera module assembly
• CPC Class Codes: H04M 1/0266 for a display module assembly
• CPC Class Codes: H04N 1/00127 Connection or combination of a still picture apparatus with another apparatus, e.g. for storage, processing or transmission of still picture signals or of information associated with a still picture
• CPC Class Codes: H04N 1/00129 with a display device, e.g. CRT or LCD monitor with a television apparatus H04N1/00283; arrangements for control of display devices G09G
• CPC Class Codes: H04N 1/028 for picture information pick-up
• CPC Class Codes: H04N 1/02805 with photodetectors arranged in a two-dimensional array

Abstract

A display device using a novel semiconductor device, which includes a pixel matrix, an image sensor, and a peripheral circuit for driving those, that is, which has both a camera function and a display function, and is made intelligent, is provided and a method of manufacturing the same is also provided. One pixel includes a semiconductor device for display and a semiconductor for light reception, that is, one pixel includes semiconductor devices (insulated gate-type field effect semiconductor device) for controlling both display and light reception, so that the display device having a picture reading function is made miniaturized and compact.

Claims

1. An electronic device having at least one liquid crystal panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first transparent electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film;

,

a second interlayer insulating film formed over said first interlayer insulating film and said photoelectric conversion element; and

a light reflective pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

2. An electronic device according to claim 1 wherein said first and second thin film transistors are formed in a same level.

3. An electronic device according to claim 1 wherein said first and second thin film transistors have a same cross sectional structure.

4. An electronic device according to claim 1 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

5. An electronic device according to claim 1 wherein said electronic device is a still camera.

6. An electronic device according to claim 1 wherein said electronic device is a portable phone.

7. An electronic device having at least one active matrix display panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first transparent electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film formed over said first interlayer insulating film and said photoelectric conversion element; and

a light reflective pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

8. An electronic device according to claim 7 wherein said first and second thin film transistors are formed in a same level.

9. An electronic device according to claim 7 wherein said first and second thin film transistors have a same cross sectional structure.

10. An electronic device according to claim 7 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

11. An electronic device according to claim 7 wherein said electronic device is a still camera.

12. An electronic device according to claim 7 wherein said electronic device is a portable phone.

13. An electronic device having at least one active matrix display panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel wherein light shielding films are disposed between said transparent substrate and said first and second thin film transistors;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first transparent electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film formed over said first interlayer insulating film and said photoelectric conversion element; and

a light reflective pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

14. An electronic device according to claim 13 wherein said first and second thin film transistors are formed in a same level.

15. An electronic device according to claim 13 wherein said first and second thin film transistors have a same cross sectional structure.

16. An electronic device according to claim 13 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

17. An electronic device according to claim 13 wherein said electronic device is a still camera.

18. An electronic device according to claim 13 wherein said electronic device is a portable phone.

19. An electronic device according to claim 13 wherein said display panel is a liquid crystal display panel.

20. An electronic device having at least one active matrix display panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first transparent electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film comprising an organic resin film formed over said first interlayer insulating film and said photoelectric conversion element wherein said second interlayer insulating film has a leveled upper surface; and

a light reflective pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

21. An electronic device according to claim 20 wherein said first and second thin film transistors are formed in a same level.

22. An electronic device according to claim 20 wherein said first and second thin film transistors have a same cross sectional structure.

23. An electronic device according to claim 20 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

24. An electronic device according to claim 20 wherein said electronic device is a still camera.

25. An electronic device according to claim 20 wherein said electronic device is a portable phone.

26. An electronic device according to claim 20 wherein said display panel is a liquid crystal display panel.

27. An electronic device having at least one active matrix display panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors wherein said first interlayer insulating film comprises an organic resin film to provide a leveled upper surface thereon;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first transparent electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film formed over said first interlayer insulating film and said photoelectric conversion element; and

a light reflective pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

28. An electronic device according to claim 27 wherein said first and second thin film transistors are formed in a same level.

29. An electronic device according to claim 27 wherein said first and second thin film transistors have a same cross sectional structure.

30. An electronic device according to claim 27 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

31. An electronic device according to claim 27 wherein said electronic device is a still camera.

32. An electronic device according to claim 27 wherein said electronic device is a portable phone.

33. An electronic device according to claim 27 wherein said display panel is a liquid crystal display panel.

34. An electronic device having at least one active matrix display panel, said panel comprising:

a substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first electrode, and a second electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film formed over said first interlayer insulating film and said photoelectric conversion element; and

a pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

35. An electronic device according to claim 34 wherein said first and second thin film transistors are formed in a same level.

36. An electronic device according to claim 34 wherein said first and second thin film transistors have a same cross sectional structure.

37. An electronic device according to claim 34 wherein said photoelectric conversion element is located under said pixel electrode.

38. An electronic device according to claim 34 wherein said electronic device is a still camera.

39. An electronic device according to claim 34 wherein said electronic device is a portable phone.

40. An electronic device having at least one active matrix display panel, said panel comprising:

a substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a first interlayer insulating film covering said first and second thin film transistors;

a photoelectric conversion element formed on said first interlayer insulating film and electrically connected to said first thin film transistor through said first interlayer insulating film wherein said photoelectric conversion element comprises a first electrode formed on said first interlayer insulating film, a photosensitive semiconductor film formed on the first electrode, and a second electrode formed on the photosensitive semiconductor film;

a second interlayer insulating film comprising an organic resin film formed over said first interlayer insulating film and said photoelectric conversion element wherein said second interlayer insulating film has a leveled upper surface; and

a pixel electrode formed on said second interlayer insulating film and electrically connected to said second thin film transistor.

41. An electronic device according to claim 40 wherein said first and second thin film transistors are formed in a same level.

42. An electronic device according to claim 40 wherein said first and second thin film transistors have a same cross sectional structure.

43. An electronic device according to claim 40 wherein said photoelectric conversion element is located under said pixel electrode.

44. An electronic device according to claim 40 wherein said electronic device is a still camera.

45. An electronic device according to claim 40 wherein said electronic device is a portable phone.

46. An electronic device according to claim 40 wherein said display panel is a liquid crystal display panel.

47. An electronic device having at least one active matrix display panel, said panel comprising:

a transparent substrate having at least one pixel;

a first thin film transistor and a second thin film transistor disposed in said at least one pixel;

a photoelectric conversion element formed over said substrate and electrically connected to said first thin film transistor wherein said photoelectric conversion element comprises a first transparent electrode, a photosensitive semiconductor film formed on the first transparent electrode, and a second light reflective electrode formed on the photosensitive semiconductor film so that light entered through said transparent substrate is received by said photoelectric conversion element;

an interlayer insulating film formed over said photoelectric conversion element, and said first and second thin film transistors; and

a light reflective pixel electrode formed on said interlayer insulating film and electrically connected to said second thin film transistor.

48. An electronic device according to claim 47 wherein said first and second thin film transistors are formed in a same level.

49. An electronic device according to claim 47 wherein said first and second thin film transistors have a same cross sectional structure.

50. An electronic device according to claim 47 wherein said photoelectric conversion element is located under said light reflective pixel electrode.

51. An electronic device according to claim 47 wherein said electronic device is a still camera.

52. An electronic device according to claim 47 wherein said electronic device is a portable phone.

53. An electronic device according to claim 47 wherein said insulating film comprises an organic resin film having a leveled upper surface.