Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor

• US 6,244,110 B1
• Filed: 04/07/2000
• Issued: 06/12/2001
• Est. Priority Date: 03/29/1996
• Status: Expired due to Fees

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Takeuchi, Yukihisa, Ohnishi, Takao, Namerikawa, Masahiko, Shibata, Kazuyoshi
• Primary Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US09/545,688
• Time in Patent Office: 431 Days
• Field of Search: 735/041.2, 735/041.5, 735/041.6, 735/040.2, 735/040.4
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5628 Manufacturing; Trimming; Mounting; Housings
• CPC Class Codes: G01P 15/0922 of the bending or flexing mode type
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A vibration gyro sensor is constructed as follows. Namely, a detecting piezoelectric/electrostrictive element 12, which detects displacement generated in a direction perpendicular to a direction of vibration of a vibrator 2 when the vibrator is rotated, is provided on a detecting section. The detecting section is constructed by an integrated fired product made of ceramics together with the vibrator 2 and a support base 4. The detecting section is constructed by a first plate-shaped section 6 which is more thin-walled than the vibrator 2 and which has its principal surface extending in the direction of vibration. The piezoelectric/electrostrictive element 12 is formed in an integrated manner on the first plate-shaped section 6 in accordance with a film formation method. Further, a thin-walled second plate-shaped section 8, which is provided for decreasing rigidity in the direction of vibration and facilitating the vibration for the vibrator 2, is formed in an integrated manner so that its principal surface extends in the direction perpendicular to the direction of vibration. Accordingly, it is possible to obtain the vibration gyro sensor made of ceramics having excellent sensitivity, in which the characteristics of the vibrator are scarcely affected by an ambient magnetic field, processing or machining can be easily performed, and the electric characteristics can be advantageously adjusted.

Claims

1. A combined sensor comprising a vibration gyro sensor and another sensor having a function different from that of said vibration gyro sensor;

said vibration gyro sensor comprising at least one or more vibrators subjected to excited vibration effected by at least one or more driving means, a support base for supporting said vibrator at a proximal end thereof, at least one or more detecting sections including at least one or more detecting piezoelectric/electrostrictive elements for detecting displacement generated in a direction perpendicular to a direction of vibration of said vibrator when said vibrator is rotated, said detecting section composed of an integrated fired product made of ceramics together with said vibrator and said support base, said detecting section being constructed by a first plate-shaped section which is more thin-walled than said vibrator and which has a principal surface extending in said direction of vibration, said detecting piezoelectric/electrostrictive element formed in an integrated manner on said first plate-shaped section in accordance with a film formation method, at least one or more thin-walled second plate-shaped sections for decreasing rigidity in said direction of vibration and facilitating said vibration, said second plate-shaped section being provided for said vibrator in an integrated manner so that a principal surface thereof extends in said direction perpendicular to said direction of vibration, said support base constructed by an attachment frame positioned outside said vibrator and separated by predetermined spacing distances therefrom so that said vibrator is surrounded thereby, and said driving means provided in an integrated manner between said attachment frame and said vibrator; and

said combined sensor further comprising a second attachment frame formed in an integrated manner with said attachment frame and provided adjacent to said attachment frame of said vibration gyro sensor;

wherein said another sensor is supported in an integrated manner in said second attachment frame.

2. A combined sensor comprising a vibration gyro sensor and another sensor having a function different from that of said vibration gyro sensor;

said vibration gyro sensor comprising two vibrators arranged in parallel to one another and mutually subjected to excited vibration, a frame for surrounding said vibrators and supporting said vibrators at proximal ends thereof, detecting sections including detecting piezoelectric/electrostrictive elements for detecting displacement generated in a direction perpendicular to a direction of vibration of said vibrators when said vibrators are rotated, said detecting sections composed of an integrated fired product made of ceramics together with said vibrators and said frame, said detecting sections being constructed by first plate-shaped sections which are more thin-walled than said vibrators and which have principal surfaces extending in said direction of vibration, said detecting piezoelectric/electrostrictive elements formed in an integrated manner on said first plate-shaped sections in accordance with a film formation method, a thin-walled second plate-shaped section for decreasing rigidity in said direction of vibration and facilitating said vibration, said second plate-shaped section being formed in an integrated manner for a portion located between regions of said frame for supporting said two vibrators so that a principal surface thereof extends in said direction perpendicular to said direction of vibration, a portion of said frame opposing to a region for forming said second plate-shaped section, said portion being a third plate-shaped section which is more thin-walled than said frame, a driving piezoelectric/electrostrictive element formed in an integrated manner on said third plate-shaped section in accordance with said film formation method, said two vibrators being vibrated in an excited manner on the basis of vibration of said frame effected by said driving piezoelectric/electrostrictive element, an attachment section provided for fixing said frame and formed in an integrated manner on an outer surface of said region for forming said second plate-shaped section, and an attachment frame provided in an integrated manner with said attachment section, said attachment frame being positioned outside said frame and separated by predetermined distances therefrom so that said frame is surrounded thereby; and

said combined sensor further comprising a second attachment frame formed in an integrated manner with said attachment frame and provided adjacent to said attachment frame of said vibration gyro sensor;

wherein said another sensor is supported in an integrated manner in said second attachment frame.

3. A combined sensor comprising a vibration gyro sensor and another sensor having a function different from that of said vibration gyro sensor;

said vibration gyro sensor comprising two vibrators arranged in parallel to one another and mutually subjected to excited vibration, a support base for supporting said vibrators at proximal ends thereof, and detecting sections including detecting piezoelectric/electrostrictive elements for detecting displacement generated in a direction perpendicular to a direction of vibration of said vibrators when said vibrators are rotated, said vibration gyro sensor including;

said detecting sections composed of an integrated fired product made of ceramics together with said vibrators and said support base, said detecting sections being constructed by first plate-shaped sections which are more thin-walled than said vibrators and which have principal surfaces extending in said direction of vibration;

said detecting piezoelectric/electrostrictive elements formed in an integrated manner on said first plate-shaped sections in accordance with a film formation method;

a thin-walled second plate-shaped section for decreasing rigidity in said direction of vibration and facilitating said vibration, said second plate-shaped section being formed in an integrated manner for a portion located between regions of said support base for supporting said two vibrators so that a principal surface thereof extends in said direction perpendicular to said direction of vibration;

an attachment section provided with an attachment frame connected in an integrated manner to an outer surface of a region for forming said second plate-shaped section and disposed outside said two vibrators and said support base while being separated therefrom by predetermined distances so that said two vibrators and said support base are surrounded thereby;

third plate-shaped sections more thin-walled than said support base and formed in an integrated manner to bridge said attachment frame and portions of said support base located on both sides of said second plate-shaped section respectively; and

driving piezoelectric/electrostrictive elements formed in an integrated manner on said third plate-shaped sections in accordance with said film formation method;

said two vibrators being vibrated in an excited manner on the basis of vibration of said support base effected by said driving piezoelectric/electrostrictive elements; and

said combined sensor further comprising a second attachment frame formed in an integrated manner with said attachment frame and provided adjacent to said attachment frame of said vibration gyro sensor;

wherein said another sensor is supported in an integrated manner in said second attachment frame.