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Sensor device for non-intrusive diagnosis of a semiconductor processing system

  • US 6,244,121 B1
  • Filed: 03/06/1998
  • Issued: 06/12/2001
  • Est. Priority Date: 03/06/1998
  • Status: Expired due to Term
First Claim
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1. A movable wireless sensor device for performing diagnostics within a substrate processing system, comprising:

  • a support platform having physical dimensions substantially similar to dimensions of a substrate being processed; and

    at least one electronic device mounted to the support platform and including a sensor adapted to sense a condition of the support platform and provide condition signals indicative of the condition of the support platform.

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