Fabrication of ceramic microstructures from polymer compositions containing ceramic nanoparticles
First Claim
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1. A method for preparing ceramic microstructures, comprising:
- (a) providing, as a mold, a substrate having a pattern on its surface, said pattern comprised of chemically removable elevated segments and corresponding voids therebetween;
(b) applying a curable polymer composition to the substrate surface and pressing the composition into the voids of the surface pattern, said curable polymer composition comprising ceramic nanoparticles and a curable binder polymer; and
(c) curing the polymer to provide ceramic microstructures in said voids.
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Abstract
A method is provided for fabricating ceramic microstructures, i.e., microcomponents of micron or submicron dimensions. A polymer composition is prepared containing a polymer, typically a thermally or chemically curable polymer, and nanometer size (1 to 1000 nm in diameter) ceramic particles. A mold, such as a lithographically patterned mold, preferably a LIGA mold, is filled with the polymer composition and the polymer is then cured or otherwise hardened. The elevated segments of the mold are then removed. The surface-attached ceramic microstructures so provided may then be removed from the substrate and, if desired, pyrolyzed and sintered.
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Citations
53 Claims
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1. A method for preparing ceramic microstructures, comprising:
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(a) providing, as a mold, a substrate having a pattern on its surface, said pattern comprised of chemically removable elevated segments and corresponding voids therebetween;
(b) applying a curable polymer composition to the substrate surface and pressing the composition into the voids of the surface pattern, said curable polymer composition comprising ceramic nanoparticles and a curable binder polymer; and
(c) curing the polymer to provide ceramic microstructures in said voids. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 52, 53)
(d) removing the elevated segments to provide said ceramic microstructures on the substrate surface.
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16. The method of claim 15, further including:
(e) removing the ceramic microstructures from the substrate surface.
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17. The method of claim 15, further comprising pyrolyzing the ceramic microstructures by heating to a temperature effective to remove organic material contained therein and to convert any inorganic material present to ceramic material.
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18. The method of claim 16, further comprising pyrolyzing the ceramic microstructures by heating to a temperature effective to remove organic material contained therein and to convert any inorganic material present to ceramic material.
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19. The method of claim 17, wherein pyrolyzing is conducted at a temperature in the range of about 300°
- to 700°
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- to 700°
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20. The method of claim 19, wherein pyrolyzing is conducted at a temperature in the range of about 400°
- C. to 600°
C.
- C. to 600°
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21. The method of claim 18, wherein pyrolyzing is conducted at a temperature in the range of about 300°
- C. to 700°
C.
- C. to 700°
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22. The method of claim 21, wherein pyrolyzing is conducted at a temperature in the range of about 400°
- C. to 600°
C.
- C. to 600°
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23. The method of claim 1, wherein the ceramic nanoparticles are in the range of approximately 1 to 1000 nanometers in diameter.
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24. The method of claim 23, wherein the ceramic nanoparticles are in the range of approximately 1 to 500 nanometers in diameter.
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25. The method of claim 24, wherein the ceramic nanoparticles are in the range of approximately 1 to 100 nanometers in diameter.
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26. The method of claim 1, wherein the ceramic nanoparticles are comprised of a metal oxide.
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27. The method of claim 26, wherein the metal oxide is selected from the group consisting of Al2O3, ZrO2, TiO2, ZnO, SiO2, BaTiO3, SrTiO3, WO2, WO3, Fe2O3, Fe3O4, Ca5(PO4)OH, MnFe2O4, PbZr0.5Ti0.5O3, BaFe12O19, CrO2, Cr2O3, MoO2 and MoO3.
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28. The method of claim 1, wherein the ceramic nanoparticles are comprised of SiC, Si3N4 or Si2ON2.
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29. The method of claim 1, wherein the ceramic nanoparticles are comprised of aluminum nitride, tungsten carbide, barium samarium cobalt, neodymium iron boride, TiN, TiC, MoSe2, MoSe3, MoS2 or MoS3.
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30. The method of claim 1, wherein the mold used in part (a) is a lithographically patterned mold and the voids of the surface pattern are less than about 100 microns in diameter, so that the resulting ceramic microstructures are less than about 100 microns in diameter.
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31. The method of claim 30, wherein the mold is a LIGA mold.
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32. The method of claim 30, wherein the aspect ratio of the ceramic microstructure is greater than about 20:
- 1.
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33. The method of claim 32, wherein the aspect ratio of the ceramic microstructure is greater than about 40:
- 1.
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34. The method of claim 1, wherein the curable polymer composition further comprises a solvent for the curable binder polymer.
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35. The method of claim 34, wherein the solvent is water or a lower alkanol.
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36. The method of claim 34, wherein the ceramic nanoparticles represent approximately 5 wt. % to 95 wt. % of the curable polymer composition.
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37. The method of claim 36, wherein the curable polymer represents approximately 5 wt. % to 30 wt. % of the curable polymer composition.
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38. The method of claim 1, wherein the elevated segments are comprised of a photoresist material.
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39. The method of claim 38, wherein the photoresist material is poly(methyl methacrylate).
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40. The method of claim 1, wherein the substrate is comprised of metallized silicon.
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41. The method of claim 1, further comprising, following step (b) and prior to step (c), planarizing the substrate surface to remove excess polymer composition.
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52. A ceramic microstructure prepared by the process of claim 17.
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53. A ceramic microstructure prepared by the process of claim 18.
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42. A method for preparing ceramic microstructures, comprising:
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(a) providing a lithographically patterned mold comprising a substrate having a pattern on its surface, said pattern comprised of chemically removable elevated segments and corresponding voids therebetween, said voids having a diameter of less than about 100 microns in diameter;
(b) applying a curable polymer composition to the substrate surface and pressing the composition into the voids of the surface pattern, said curable polymer composition comprising a paste of ceramic nanoparticles having a diameter in the range of approximately 1 nm to 1000 nm, a curable binder polymer selected from the group consisting of vinyl polymers, acrylic polymers, silicon-containing polymers, epoxy resins, and copolymers and blends thereof, and a solvent for the curable binder polymer, wherein the ceramic nanoparticles represent approximately 15 wt. % to 95 wt. % of the composition and the curable polymer represents approximately 5 wt. % to 30 wt. % of the composition;
(c) curing the polymer to provide ceramic microstructures in said voids; and
(d) removing the elevated segments to provide said ceramic microstructures on the substrate surface.
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43. A method for preparing ceramic microstructures permanently affixed to a substrate, comprising:
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(a) providing a substrate having a substantially planar surface and a recess therein extending from the substrate surface into the substrate interior, wherein the recess is shaped such that the width of the recess at the substrate surface is smaller than the width of the recess in the substrate interior;
(b) applying a curable polymer composition to the substrate surface and pressing the composition into the recess, said polymer composition comprising a curable binder polymer, ceramic nanoparticles and a solvent for the binder polymer, while allowing a portion of the composition to remain on the substrate surface above the recess; and
(c) curing the binder polymer to provide a ceramic microstructure having a first segment in said recess and conforming in shape thereto, and a second segment above the substrate surface. - View Dependent Claims (44)
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45. A method for preparing ceramic microstructures, comprising:
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(a) providing, as a mold, a substrate having a pattern on its surface, said pattern comprised of chemically removable elevated segments and corresponding voids therebetween;
(b) forming a paste of a binder polymer, ceramic nanoparticles, and a solvent for said polymer;
(c) applying the paste to the substrate surface and pressing the paste into the voids of the surface pattern; and
(c) removing the solvent to provide ceramic microstructures in said voids.
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46. A ceramic microstructure comprising a compressed solid of:
a matrix of a cured polymer; and
ceramic nanoparticles dispersed throughout the matrix, wherein the aspect ratio of the microstructure is greater than about 20;
1.- View Dependent Claims (47, 48, 49, 50, 51)
Specification