Magnetic field generator and charged particle beam irradiator
First Claim
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1. A magnetic field generator comprising:
- a first return yoke having a first internal volume;
a magnetic pole pair comprising a pair of magnetic poles disposed opposite each other, disposed in the first internal volume, and movable relative to said first return yoke; and
a driver for moving said magnetic pole pair within the first internal volume.
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Abstract
A magnetic field generator includes a movable magnetic pole pair within a stationary return yoke, modifying a magnetic field at a high speed with high precision. The magnetic field generator includes a first return yoke having a first internal volume, a magnetic pole pair with magnetic poles disposed opposite each other, disposed in the first internal volume, and movable relative to the first return yoke, and a driver for moving the magnetic pole pair within the first internal volume.
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Citations
19 Claims
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1. A magnetic field generator comprising:
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a first return yoke having a first internal volume;
a magnetic pole pair comprising a pair of magnetic poles disposed opposite each other, disposed in the first internal volume, and movable relative to said first return yoke; and
a driver for moving said magnetic pole pair within the first internal volume. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A charged particle beam irradiator comprising:
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a charged particle beam generator for generating a charged particle beam; and
a magnetic field generator for deflecting the charged particle beam to adjust a position on an irradiated object irradiated by the charged particle beam, wherein said magnetic field generator comprises;
a first return yoke having a first internal volume;
a magnetic pole pair comprising a pair of magnetic poles disposed opposite each other, disposed in the first internal volume, and movable relative to said first return yoke; and
a driver for moving said magnetic pole pair within the first internal volume. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A charged particle beam irradiator comprising:
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a charged particle beam generator for generating a charged particle beam, and a magnetic field generator for deflecting the charged particle beam to adjust a position on an irradiated object irradiated by the charged particle beam, wherein said magnetic field generator comprises;
a first magnetic field generator for deflecting the charged particle beam, and a second magnetic field generator for deflecting the charged particle beam deflected by the first magnetic field generator, one of the first and second magnetic field generators comprising a first return yoke having a first internal volume and a first magnetic pole pair comprising a pair of magnetic poles disposed opposite each other, disposed in the first internal volume, and movable relative to said first return yoke. - View Dependent Claims (17, 18, 19)
the first internal volume has a substantially circular cross-section, and the first magnetic pole pair is rotatably disposed along an internal surface of said first return yoke;
said second return yoke internal volume has a substantially circular cross-section, and the second magnetic pole pair is rotatably disposed along an internal surface of said second return yoke; and
the charged particle beam irradiator comprises a driver for rotationally moving the first magnetic pole pair and the second magnetic pole pair in an interlocking manner.
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19. The charged particle beam irradiator as defined in claim 16 wherein the second magnetic field generator comprising said first return yoke and said first magnetic pole pair, a cross-section of the first internal volume has a pair of parallel sides, the first magnetic pole pair is linearly movable along an internal surface of the first return yoke toward a deflection direction of said first magnetic field generator.
Specification