Method of manufacture of a magnetostrictive ink jet printer
First Claim
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1. A method of manufacturing an ink jet printhead which includes:
- providing a substrate with a first embedded layer;
depositing a first permanent layer of magnetostrictive material to form an actuator;
depositing a second permanent layer to form a solenoid that applies a magnetic field to the actuator;
etching said substrate to create a nozzle chamber; and
etching said first embedded layer to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle, wherein the actuator includes the layer of magnetostrictive material to be responsive to an applied magnetic field to cause a change of state of said at least part of the actuator which results in displacement of the actuator for effecting ink ejection from the array of nozzles, thereby forming said printhead.
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Abstract
This patent describes a method of manufacturing a magnetostrictive ink jet print head wherein an array of nozzles are formed on a substrate utilising planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The print heads can be formed utilising standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.
20 Citations
8 Claims
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1. A method of manufacturing an ink jet printhead which includes:
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providing a substrate with a first embedded layer;
depositing a first permanent layer of magnetostrictive material to form an actuator;
depositing a second permanent layer to form a solenoid that applies a magnetic field to the actuator;
etching said substrate to create a nozzle chamber; and
etching said first embedded layer to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle, wherein the actuator includes the layer of magnetostrictive material to be responsive to an applied magnetic field to cause a change of state of said at least part of the actuator which results in displacement of the actuator for effecting ink ejection from the array of nozzles, thereby forming said printhead. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification