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Porous semiconductor-based optical interferometric sensor

  • US 6,248,539 B1
  • Filed: 10/30/1997
  • Issued: 06/19/2001
  • Est. Priority Date: 09/05/1997
  • Status: Expired due to Term
First Claim
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1. Means for detecting shifts in Fabry-Perot fringes with a solid state sensor, said fringes being reflected from a substrate, said means for detecting comprising a semiconductor substrate having a porous surface, said substrate surface further having a plurality of discrete and separate regions, and having an organic binder compound adsorbed thereon, said substrate having a thickness selected to generate Fabry-Perot fringes from reflection of light therefrom.

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