Confocal microscopic equipment

• US 6,248,995 B1
• Filed: 05/15/1998
• Issued: 06/19/2001
• Est. Priority Date: 05/30/1997
• Status: Expired due to Fees

• Current Assignee: Yokogawa Electric Corporation
• Original Assignee: Yokogawa Electric Corporation
• Inventors: Otsuki, Shinya, Tanaami, Takeo, Tomosada, Nobuhiro, Kosugi, Yasuhito
• Primary Examiner(s): Lee, John R
• Application Number:
  US09/080,158
• Time in Patent Office: 1,131 Days
• Field of Search: 250/234, 250/235, 250/559.22, 250/559.29, 250/559.38, 250/559.06, 250/559.07, 250/559.08, 359/368, 359/385, 359/239, 348/79, 348/80
• US Class Current: 250/234
• CPC Class Codes: G01B 9/04 Measuring microscopes
• CPC Class Codes: G02B 21/0044 moving apertures, e.g. Nipkow disks, rotating lens arrays
• CPC Class Codes: G02B 21/0084 time-scale detection, e.g. strobed, ultra-fast, heterodyne detection

Abstract

Confocal microscopic equipment that can photograph confocal images at high speed and with good signal to noise ratio, wherein the equipment obtains confocal images by rotating a disk having a plurality of apertures and by scanning a sample on which light beams passing through the apertures are focused; and comprising a light source, an optical microscope, a high speed camera that photographs confocal images, a high speed confocal scanner that scans a sample with an output light beam from the light source via the optical microscope, and outputs the return light from the sample to the high speed camera, and a memory that stores confocal images photographed with the high speed camera on a real time basis.

Claims

1. In a confocal microscopic equipment that obtains optical confocal images by rotating a disk having a plurality of apertures and by scanning a sample by focusing light beams that pass through said apertures on said sample, said equipment comprising:

a light source;

an optical microscope;

a high speed camera to photograph said optical confocal images; and

a high speed confocal scanner that scans said sample with output beams from said light source via said optical microscope and that outputs return light beams from said sample to be photographed by said high speed camera;

the improvement comprising;

said high speed confocal scanner comprising;

a first planar disk having a plurality of micro-lens focusing means to which an incident beam is applied;

a second planar disk having a corresponding plurality of apertures of the same pattern as said micro-lens focusing means and disposed to be parallel to said first planar disk so that a corresponding micro-lens focusing means focus light on a corresponding aperture;

a beam splitter positioned between the parallel positioned said first planar disk and said second planar disk that transmits light beams transmitted through said first planar disk micro-lens focusing means and reflects return light beams from said apertures of said second planar disk;

a lens that focuses and outputs reflected light beams from said beam splitter; and

driving means that rotates said first planar disk and said second planar disk synchronously with each other so that corresponding micro-lens focusing means and apertures are synchronously rotated together; and

a memory that stores as actual optical frame data a plurality of optical confocal images photographed with said high speed camera on a real time basis; and

wherein said high speed camera operates at a rate higher than 30 frames per second.

2. The equipment of claim 1, further comprising an image intensifier disposed between said high speed confocal scanner and said high speed camera.

3. The equipment of claim 2, wherein said light source is a laser.

4. The equipment of claim 2, wherein said light source is a source of white light.

5. The equipment of claim 2, further comprising objective lenses having a plurality of magnifications.

6. The equipment of claim 1, further comprising a stage for scanning said sample in an optical axis direction.

7. The equipment of claim 6, wherein said light source is a laser.

8. The equipment of claim 6, wherein said light source is a source of white light.

9. The equipment of claim 6, further comprising objective lenses having a plurality of magnifications.

10. The equipment of claim 1, further comprising a controller to reconstruct a three dimensional solid image based on a plurality of confocal images stored in said memory.

11. The equipment of claim 10, wherein said light source is a laser.

12. The equipment of claim 10, wherein said light source is a source of white light.

13. The equipment of claim 10, further comprising objective lenses having a plurality of magnifications.

14. The equipment of claim 1, wherein said light source is a laser.

15. The equipment of claim 1, wherein said light source is a source of white light.

16. The equipment of claim 1, further comprising objective lenses having a plurality of magnifications.