Three chamber load lock apparatus

• US 6,250,869 B1
• Filed: 07/09/1999
• Issued: 06/26/2001
• Est. Priority Date: 11/18/1996
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kroeker, Tony R.
• Primary Examiner(s): Keenan, James W.
• Application Number:
  US09/350,790
• Time in Patent Office: 718 Days
• Field of Search: 414/217, 414/217.1, 414/221, 414/222.09, 414/222.12, 414/226.03, 414/292, 414/331.14, 414/331.18, 414/939, 414/940
• US Class Current: 414/221
• CPC Class Codes: C23C 14/566 using a load-lock chamber
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: H01L 21/67751 vertical transfer of a single workpiece
• CPC Class Codes: H01L 21/67757 vertical transfer of a batch of workpieces
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each load lock chamber preferably has a semi-cylindrical valve which remains sealed when the load lock chamber is open to atmospheric pressure. A wafer cassette holder positioned within each load lock chamber can be loaded and unloaded while the semi-cylindcical valves seal the vacuum chamber from atmospheric pressure. The semi-cylindrical valve pivots to an open position when the load lock chamber is under vacuum and the entire wafer cassette moves from the load lock chamber to the central chamber.

Claims

1. A load lock apparatus, comprising:

a central housing having a wall defining an opening for the passage of a substrate there through connecting the central housing and a substrate processing platform;

two or more load lock housings connected to the central housing, wherein a first load lock housing is disposed on an upper surface of the central housing and a second load lock housing is disposed on a lower surface of the central housing;

a load lock valve disposed between each load lock housing and the central housing; and

two or more substrate cassette holders, each cassette holder being connected to a cassette mover, each mover being adapted to transfer each respective cassette holder between the central housing and one of the load lock housings.

2. The apparatus of claim 1, wherein each load lock housing comprises a door valve.

3. The apparatus of claim 2, wherein each load lock valve is disposed adjacent an opening between each respective load lock housing and the central housing.

4. The apparatus of claim 3, herein a first load lock valve isolates a first space in the first load lock housing from the central housing and a second load lock valve isolates a second space in the second load lock housing from the central housing.

5. The apparatus of claim 1, wherein each load lock valve comprises a removable valve seal.

6. The apparatus of claim 1 wherein the two or more substrate cassette holders are configured to receive multiple substrates.

7. A load lock apparatus, comprising:

a central housing having a wall defining an opening for the passage of a substrate there through connecting the central housing and a substrate processing platform;

two or more load lock housings disposed vertically on opposing sides of the central housing, wherein a first load lock housing is disused on an upper surface of the central housing and a second load lock housing is disposed on a lower surface of the central housing; and

a load lock valve disposed between each load lock housing and the central housing.

8. The apparatus of claim 7, wherein each load lock valve is disposed adjacent an opening between each respective load lock housing and the central housing.

9. The apparatus of claim 7, wherein each load lock valve comprises a semi-cylindrical valve.

10. The apparatus of claim 7, further comprising:

a substrate cassette holder in each load lock housing collected to a cassette mover and disposable in each load lock housing.

11. A load lock apparatus, comprising:

a central housing having a wall defining an opening for the passage of a substrate there through connecting the central housing and a substrate processing platform;

two or more load lock housings connected to the central housing;

a semi-cylindrical valve pivotally mounted between each load lock housing and the central housing; and

two or more substrate cassette holders, each cassette holder being connected to a cassette mover, the mover being adapted to transfer each respective cassette holder between the central chamber and one of the load lock chambers.