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Susceptor for float-zone apparatus

  • US 6,251,182 B1
  • Filed: 05/11/1993
  • Issued: 06/26/2001
  • Est. Priority Date: 05/11/1993
  • Status: Expired due to Term
First Claim
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1. In combination with a float-zone apparatus for processing a silicon element, the apparatus having an RF induction coil heater and an element holder and a seed holder aligned vertically above and below the RF induction coil heater, the element holder being adapted to hold one end of a silicon element and the seed holder being adapted to hold a seed crystal of silicon, means for positioning the element holder relative to the RF induction coil heater to bring the free end of the silicon element into proximity with the RF induction coil heater to melt the free end of the silicon element forming a molten zone, and means for positioning the seed holder relative to the RF induction coil heater so that the seed crystal contacts and fuses with the molten zone, and means for varying the relative position of the RF induction coil heater to the silicon element such that the molten zone is moved along the length of the silicon element, the improvement comprising:

  • a cylindrical susceptor positionable around the free end of the silicon element.

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