Please download the dossier by clicking on the dossier button x
×

Fluid dispensing system having independently operated pumps

  • US 6,251,293 B1
  • Filed: 02/14/2000
  • Issued: 06/26/2001
  • Est. Priority Date: 03/28/1989
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method of dispensing a fluid for use within the microelectronics industry, including the steps of:

  • pumping said fluid with first pumping means;

    receiving said fluid by operating second pumping means;

    dispensing said fluid from an outlet downstream of said second pumping means; and

    sucking-back fluid downstream of said second pumping means.

View all claims
  • 12 Assignments
Timeline View
Assignment View
    ×
    ×