Method of detecting defects in patterned substrates

• US 6,252,412 B1
• Filed: 01/08/1999
• Issued: 06/26/2001
• Est. Priority Date: 01/08/1999
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Schlumberger Technologies Incorporated (SLB)
• Inventors: Lo, Chiwoei Wayne, Talbot, Christopher G.
• Primary Examiner(s): Karlsen, Ernest
• Assistant Examiner(s): KOBERT, RUSSELL MARC
• Application Number:
  US09/226,967
• Time in Patent Office: 900 Days
• Field of Search: 324/750, 324/751, 250/310, 250/311
• US Class Current: 324/754.22
• CPC Class Codes: G06T 7/0004 Industrial image inspection
• CPC Class Codes: H01J 2237/202 Movement
• CPC Class Codes: H01J 2237/221 Image processing
• CPC Class Codes: H01J 2237/24592 Inspection and quality control of devices
• CPC Class Codes: H01J 2237/2485 Electric or electronic means
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

Defects in a patterned substrate are detected by positioning a charged-particle-beam optical column relative to a patterned substrate, the charged-particle imaging system having a field of view (FOV) with a substantially uniform resolution over the FOV; operating the charged-particle-beam optical column to acquire images over multiple subareas of the patterned substrate lying within the FOV by scanning a charged-particle beam over the patterned substrate while maintaining the charged-particle-beam optical column fixed relative to the patterned substrate; and comparing the acquired images to a reference to identify defects in the patterned substrate. The use of a large- FOV imaging system with substantially uniform resolution over the FOV allows acquisition of images over a wide area of the patterned substrate without requiring mechanical stage moves, thereby reducing the time overhead associated with mechanical stage moves. Multiple columns can be ganged together to further improve throughput.

Claims

1. A method of detecting defects in a patterned substrate, comprising:

(1) positioning a charged-particle-beam optical column relative to a patterned substrate, the charged-particle-beam optical column having a field of view (FOV) greater than approximately 100 microns with a substantially uniform resolution over the FOV;

(2) operating the charged-particle-beam optical column to acquire a plurality of images of a region of the patterned substrate lying within the FOV by scanning the charged-particle beam over the patterned substrate while maintaining the charged-particle-beam optical column fixed relative to the patterned substrate, each image being that of sububarea of the region and acquired at a sub-FOV; and

(3) comparing the acquired images to a reference to identify defects in the patterned substrate.

2. The method of claim 1, wherein the charged-particle-beam column includes an electron-beam source.

3. The method of claim 2, wherein the electron-beam source includes a thermal-field-emission cathode.

4. The method of claim 2, wherein the electron-beam source includes a zirconium-tungsten cathode.

5. The method of claim 1, further comprising operating a mechanical stage to change the position of the charged-particle-beam optical column relative to the patterned substrate, and repeating steps 1, 2 and 3 to acquire images from a futher region of the patterned substrate.

6. The method of claim 1, further comprising monitoring position of the mechanical stage with a laser interferometer.

7. The method of claim 1, wherein operating the charged-particle-beam optical column to acquire images comprises acquiring voltage-contrast images.

8. The method of claim 1, ftirther comprising applying charged particles to pre-charge the patterned substrate prior to operating the charged-particle-beam optical column to acquire images.

9. The method of claim 1, wherein operating the charged-particle-beam optical column to acquire images comprises acquiring topographic images, and wherein comparing comprises comparing the acquired images to a reference to identify topographic defects in the patterned substrate.

10. The method of claim 1, wherein the reference image comprises an image of a portion of the patterned substrate.

11. The method of claim 1, wherein the reference image comprises a stored reference image.

12. The method of claim 1, wherein the reference image comprises an image generated from a computer-aided-design (CAD) database.

13. The method of claim 1, wherein comparing the acquired images comprises comparing features of the acquired images with features of a reference image to identify defects in the patterned substrate.

14. The method of claim 1, wherein the acquired images are comprised of pixels and the reference is a reference image comprised of pixels, and wherein comparing the acquired images comprises comparing the acquired images pixel-by-pixel with the reference image.

15. The method of claim 1, further comprising applying a flood beam to the patterned substrate prior to operating the charged-particle-beam optical column to acquire images.

16. The method of claim 15, wherein applying the flood beam to the patterned substrate comprises applying the flood beam to a sub-area of the FOV.

17. The method of claim 1, wherein the charged-particle-beam optical column comprises a variable-axis immersion lens (VAIL).

18. The method of claim 1, wherein the charged-particle-beam optical column includes an in-lens charged-particle detector for collecting and detecting secondary particles substantially uniformly across the FOV.

19. The method of claim 1, further comprising:

positioning a second charge-particle-beam optical column relative to the patterned substrate, the second charged-particle optical column having a field of view (FOV) with a substantially uniform resolution over the FOV;

operating the second charged-particle-beam optical column to acquire second images over multiple subareas of a region of the patterned substrate lying within the FOV by scanning the second charged-particle beam over the patterned substrate while maintaining the second charged-particle-beam optical column fixed relative to the patterned substrate; and

comparing the acquired second images to a reference to identify defects in the patterned substrate.