×

Planar reflective light valve backplane

  • US 6,252,999 B1
  • Filed: 12/23/1998
  • Issued: 06/26/2001
  • Est. Priority Date: 12/23/1998
  • Status: Expired due to Term
First Claim
Patent Images

1. An integrated electronic device comprising:

  • a substrate including a plurality of surface projections defining gaps therebetween;

    an etch-resistant layer formed on said substrate; and

    a fill layer formed on a portion of said etch-resistant layer in said gaps.

View all claims
  • 6 Assignments
Timeline View
Assignment View
    ×
    ×